Mr. Bo-Yun Hsueh Profile

Bo-Yun Hsueh

at United Microelectronics Corp

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Author

Publications (4)

Proceedings Article | 24 March 2009 Paper

Sampling strategy: optimization and correction for high-order overlay control for 45nm process node

Bo Yun Hsueh, George Huang, Chun-Chi Yu, Chin-Chou Kevin Huang, Chien-Jen Huang, James Manka, David Tien

Proceedings Volume 7272, 727231 (2009) https://doi.org/10.1117/12.812929

KEYWORDS: Semiconducting wafers, Overlay metrology, Process control, Control systems, Metrology, Error analysis, Scanners, Lithography, Immersion lithography, Environmental sensing

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Proceedings Article | 24 March 2008 Paper

High order correction and sampling strategy for 45nm immersion lithography overlay control

Bo Yun Hsueh, George Huang, Chun-Chi Yu, Jerry Hsu, Chin-Chou Kevin Huang, Chien-Jen Huang, David Tien

Proceedings Volume 6922, 69222Q (2008) https://doi.org/10.1117/12.772107

KEYWORDS: Semiconducting wafers, Overlay metrology, Data modeling, Statistical modeling, Immersion lithography, Scanners, Error analysis, Metrology, Lithography, Process control

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Proceedings Article | 12 March 2008 Paper

Effects of laser bandwidth on tool to tool CD matching

Bo-Yun Hsueh, Hung-Yi Wu, Louis Jang, Met Yeh, Chen-Chin Yang, George K.C. Huang, Chun-Chi Yu, Allen Chang

Proceedings Volume 6924, 69244K (2008) https://doi.org/10.1117/12.773567

KEYWORDS: Critical dimension metrology, Lithography, Semiconducting wafers, Imaging systems, Laser scanners, 3D scanning, Laser stabilization, Tunable lasers, Spectroscopy, Coherence (optics)

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Proceedings Article | 26 March 2007 Paper

Feasibility study of splitting pitch technology on 45-nm contact patterning with 0.93 NA

Yung Feng Cheng, Yueh Lin Chou, Ting Cheng Tseng, Bo Yun Hsueh, Chuen Huei Yang

Proceedings Volume 6520, 65202N (2007) https://doi.org/10.1117/12.711904

KEYWORDS: Printing, Semiconducting wafers, Logic, Optical lithography, Resolution enhancement technologies, Photomasks, Double patterning technology, Etching, Image processing, Atrial fibrillation

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