Dr. Bong-Ryoul Choi Profile

Dr. Bong-Ryoul Choi

Sr. Staff Engineer at ASML San Jose

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Publications (2)

Proceedings Article | 28 March 2014 Paper

"Smart" source, mask, and target co-optimization to improve design related lithographically weak spots

No-Young Chung, Pil-Soo Kang, Na-Rae Bang, Jong-Du Kim, Suk-Ju Lee, Byung-Il Choi, Bong-Ryoul Choi, Sung-Woon Park, Ki-Ho Baik, Stephen Hsu, Rafael Howell, Xiaofeng Liu, Keith Gronlund

Proceedings Volume 9053, 90530H (2014) https://doi.org/10.1117/12.2047077

KEYWORDS: Photomasks, Source mask optimization, Optical proximity correction, Metals, Manufacturing, Lithography, Photovoltaics, Resolution enhancement technologies, Optimization (mathematics), Optical lithography

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Proceedings Article | 4 December 2008 Paper

Novel process proximity correction by the pattern-to-pattern matching method with DBM

Dae-Jin Park, Jinyoung Choi, Hyoungsoon Yune, Jaeseung Choi, Cheolkyun Kim, Bong-Ryoul Choi, Donggyu Yim

Proceedings Volume 7140, 71403K (2008) https://doi.org/10.1117/12.804660

KEYWORDS: Critical dimension metrology, Optical proximity correction, Transistors, Semiconducting wafers, Etching, Error analysis, Data modeling, Thermal effects, Databases, Metrology

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