Mr. Chunyen Chuo Profile

Chunyen Chuo

at National Yang Ming Chiao Tung Univ.

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Publications (2)

Proceedings Article | 4 October 2023 Presentation + Paper

Metadiffuser fabricated by DUV KrF 248nm photolithography for wavefront manipulation

Hsuehli Liu, Chunyen Chou, Linchia Huang, Wilson Guo, Peichen Yu, Chunghsuan Huang, Chaujern Cheng

Proceedings Volume 12646, 1264608 (2023) https://doi.org/10.1117/12.2677996

KEYWORDS: Photoresist materials, Optical proximity correction, Design and modelling, Wavefronts, Deep ultraviolet, Spatial light modulators, Optical lithography, Simulations, Phase conjugation, Lithography

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Proceedings Article | 3 October 2023 Presentation + Paper

Intelligent reticle modification enabled large-area metalens patterning

Chun-yen Chou, Hsueh-li Liu, Lin-chia Huang, Wilson Guo, Peichen Yu, You-chia Chang, Yao-wei Huang, Jia-min Shieh

Proceedings Volume 12653, 126530H (2023) https://doi.org/10.1117/12.2685760

KEYWORDS: Critical dimension metrology, Optical proximity correction, Optical lithography, Nanostructures, Metalenses, Silicon nitride, Reticles

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