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Changfeng Shao
at Tsinghua Univ
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Author
Publications (4)
Proceedings Article | 23 November 2024 Paper
Improving contact lithography resolution using index matching fluids
Proceedings Volume 13240, 132400F (2024) https://doi.org/10.1117/12.3036446
KEYWORDS: Liquids, Refractive index, Lithography, Photoresist materials, Optical path differences, Refraction, Reflection, Optical gratings, Windows, Signal intensity
Proceedings Article | 23 November 2024 Poster + Paper
Pressure resistance of photoresist and substrate in contact lithography
Proceedings Volume 13240, 1324028 (2024) https://doi.org/10.1117/12.3036319
KEYWORDS: Photoresist materials, Semiconducting wafers, Lithography, Film thickness, Silicon, Deformation, Silicon films, Resistance, Photoresist developing, Manufacturing
Proceedings Article | 20 November 2024 Paper
Multireference fringe locking technique for interference lithography
Proceedings Volume 13241, 132410Q (2024) https://doi.org/10.1117/12.3036327
KEYWORDS: Optical gratings, Lithography, Lithium, Fabrication, Error analysis, Optical path differences, Nickel, Packaging, Optics manufacturing, Mode locking
Proceedings Article | 8 November 2024 Paper
Interference laser lithography for sub-wavelength gratings in visible light
Proceedings Volume 13234, 1323408 (2024) https://doi.org/10.1117/12.3036365
KEYWORDS: Prisms, Liquids, Lithography, Refractive index, Immersion lithography, Polarizers, Photoresist materials, Polarization, Visible radiation, Optical gratings
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