Dr. Chantal G. Khan-Malek
at DERCI
SPIE Involvement:
Author
Publications (26)

Proceedings Article | 21 November 2001 Paper
Proceedings Volume 4592, (2001) https://doi.org/10.1117/12.448957
KEYWORDS: X-rays, Manufacturing, X-ray lithography, Microfabrication, Synchrotron radiation, Microsystems, Photomasks, Microelectromechanical systems, Lithography, Polymethylmethacrylate

Proceedings Article | 6 April 2001 Paper
Proceedings Volume 4234, (2001) https://doi.org/10.1117/12.424425
KEYWORDS: X-rays, Polymethylmethacrylate, Photoresist processing, X-ray lithography, Semiconducting wafers, Photoresist materials, Microelectromechanical systems, Printing, Micromachining, Manufacturing

Proceedings Article | 1 September 2000 Paper
Proceedings Volume 4075, (2000) https://doi.org/10.1117/12.397932
KEYWORDS: Ion beams, Micromachining, Lithography, Etching, Optics manufacturing, X-ray lithography, Optical components, Ions, Zone plates, Gold

Proceedings Article | 21 July 2000 Paper
Proceedings Volume 3997, (2000) https://doi.org/10.1117/12.390040
KEYWORDS: Ion beams, Electron beam lithography, Zone plates, Lithography, Etching, Gold, Micromachining, Iodine, X-rays, Metals

Proceedings Article | 10 April 2000 Paper
Chantal Khan Malek, Lowell Thomas
Proceedings Volume 4019, (2000) https://doi.org/10.1117/12.382315
KEYWORDS: Polymethylmethacrylate, Interfaces, X-rays, Adhesives, Metals, Photoresist processing, Polymers, Lithography, Plating, Electrons

Proceedings Article | 8 October 1999 Paper
Chantal Khan Malek, Volker Saile
Proceedings Volume 3893, (1999) https://doi.org/10.1117/12.368455
KEYWORDS: Synchrotron radiation, Synchrotrons, Electrons, X-rays, Magnetism, Particles, Light sources, X-ray lithography, Electron beams, Superconductors

Proceedings Article | 8 October 1999 Paper
Proceedings Volume 3893, (1999) https://doi.org/10.1117/12.368464
KEYWORDS: X-rays, Photomasks, X-ray lithography, Printing, Lithography, Optical lithography, Photoresist materials, Ultraviolet radiation, Gold, Ion beams

Proceedings Article | 3 September 1999 Paper
Chantal Khan Malek, Steven Nguyen
Proceedings Volume 3875, (1999) https://doi.org/10.1117/12.360477
KEYWORDS: Photomasks, X-rays, X-ray lithography, Boron, Polymethylmethacrylate, Gold, Silicon, Silicon carbide, Beryllium, Prototyping

Proceedings Article | 20 July 1999 Paper
Gil Lee, Yoonyoung Jin, Sangwon Park, Pratul Ajmera, Chantal Khan Malek, Jin Wang, F. Tang
Proceedings Volume 3673, (1999) https://doi.org/10.1117/12.354296
KEYWORDS: Ferroelectric materials, Polymethylmethacrylate, X-rays, Thin films, Fabrication, Photoresist processing, Silicon, Image resolution, Medical imaging, Projection systems

Proceedings Article | 1 September 1998 Paper
Proceedings Volume 3512, (1998) https://doi.org/10.1117/12.324070
KEYWORDS: Photomasks, X-ray lithography, Silicon, X-rays, Semiconducting wafers, Printing, Polymethylmethacrylate, Beryllium, Optical lithography, Photoresist materials

Proceedings Article | 20 July 1998 Paper
Chantal Khan Malek, Robert Wood, Perry Genova
Proceedings Volume 3328, (1998) https://doi.org/10.1117/12.320158
KEYWORDS: Nickel, Surface finishing, Polymethylmethacrylate, Polishing, Electroplating, Plating, Metals, Microelectromechanical systems, X-ray lithography, Semiconducting wafers

Proceedings Article | 29 June 1998 Paper
Chantal Khan Malek, Volker Saile, J. Michael Klopf, Louis Rupp, Steven Nguyen
Proceedings Volume 3334, (1998) https://doi.org/10.1117/12.310729
KEYWORDS: Deep ultraviolet, X-ray lithography, Lithography, Mirrors, Synchrotron radiation, Synchrotrons, Silicon, X-rays, Photons, Ultraviolet radiation

Proceedings Article | 5 June 1998 Paper
Proceedings Volume 3331, (1998) https://doi.org/10.1117/12.309615
KEYWORDS: X-ray lithography, X-rays, Photoresist materials, Photomasks, Copper, Lithography, Ultraviolet radiation, Optical lithography, Reflection, Thin films

Proceedings Article | 2 September 1997 Paper
Proceedings Volume 3225, (1997) https://doi.org/10.1117/12.284544
KEYWORDS: Polymethylmethacrylate, Photoresist materials, Polymerization, Copper, Titanium, Annealing, Interfaces, Analytical research, Oxidation

Proceedings Article | 2 September 1997 Paper
Stefan Stadler, I. Derhalli, Chantal Khan Malek
Proceedings Volume 3225, (1997) https://doi.org/10.1117/12.284546
KEYWORDS: X-ray lithography, Mask making, Photomasks, Optical lithography, Gold, Electroplating, Resistance

Proceedings Article | 13 September 1996 Paper
Chantal Khan Malek, Robert Wood, Bruce Dudley, Zhong Ling, Volker Saile
Proceedings Volume 2880, (1996) https://doi.org/10.1117/12.250947
KEYWORDS: Optical alignment, Photomasks, X-rays, Semiconducting wafers, X-ray lithography, X-ray optics, Transmittance, Silicon, Microelectromechanical systems, Prototyping

Proceedings Article | 13 September 1996 Paper
Charles Egert, Robert Wood, Chantal Khan Malek
Proceedings Volume 2880, (1996) https://doi.org/10.1117/12.250953
KEYWORDS: Polymethylmethacrylate, Profilometers, Photomasks, X-rays, X-ray lithography, Assembly tolerances, Tolerancing, Nickel, Calibration, Gold

Proceedings Article | 13 September 1996 Paper
James Rogers, Christophe Marques, Kevin Kelly, Venkat Sangishetty, Chantal Khan Malek
Proceedings Volume 2880, (1996) https://doi.org/10.1117/12.250949
KEYWORDS: Polymethylmethacrylate, Nickel, Electroplating, Interfaces, Lithography, Photoresist processing, X-rays, Metals, Microsystems, Silicon

Proceedings Article | 26 September 1995 Paper
Reid Brennen, Michael Hecht, Dean Wiberg, Steven Manion, William Bonivert, Jill Hruby, Marcus Scholz, Timothy Stowe, Thomas Kenny, Keith Jackson, Chantal Khan Malek
Proceedings Volume 2640, (1995) https://doi.org/10.1117/12.222650
KEYWORDS: Polymethylmethacrylate, X-rays, Photomasks, Electroplating, Metals, Plating, Gold, Semiconducting wafers, Copper, X-ray imaging

Proceedings Article | 26 September 1995 Paper
Keith Jackson, Chantal Khan Malek, Lawrence Murray, William Bonivert, Jill Hruby, John Hachman, T. Chang
Proceedings Volume 2640, (1995) https://doi.org/10.1117/12.222649
KEYWORDS: Photomasks, Gold, X-rays, Lenses, Electrodes, Plating, Distortion, Tolerancing, Silicon, Electroplating

Proceedings Article | 21 January 1993 Paper
Pierre Boher, Philippe Houdy, Chantal Khan Malek, F. Ladan, S. Bac, Daniel Schirmann, Philippe Troussel, Michael Krumrey, Peter Mueller, Frank Scholze
Proceedings Volume 1742, (1993) https://doi.org/10.1117/12.140580
KEYWORDS: Multilayers, Carbon, X-rays, Diffraction gratings, Reflectivity, Silicon, Gold, Sensors, Reflection, Interfaces

SPIE Journal Paper | 1 February 1992
H. Berrouane, Chantal Khan Malek, Jean-Michel Andre, F. Ladan, Jean-Rene Rivoira, Robert Barchewitz
OE, Vol. 31, Issue 02, (February 1992) https://doi.org/10.1117/12.10.1117/12.56082
KEYWORDS: Diffraction gratings, Diffraction, Mirrors, X-rays, Sensors, X-ray diffraction, Plasma, Holography, Reactive ion etching, Kinematics

SPIE Journal Paper | 1 August 1991
Chantal Khan Malek, F. Ladan, Jean-Rene Rivoira
OE, Vol. 30, Issue 08, (August 1991) https://doi.org/10.1117/12.10.1117/12.55909
KEYWORDS: Zone plates, Mirrors, X-rays, Etching, Reflectivity, Molybdenum, Microlens, X-ray optics, Lenses, Lithography

Proceedings Article | 1 February 1991 Paper
Chantal Khan Malek, T. Moreno, Philippe Guerin, F. Ladan, Jean-Rene Rivoira, Robert Barchewitz
Proceedings Volume 1343, (1991) https://doi.org/10.1117/12.23231
KEYWORDS: Zone plates, Mirrors, Etching, X-rays, Reflectivity, Multilayers, Plasma, X-ray optics, Microfabrication, Electron beam lithography

Proceedings Article | 1 February 1991 Paper
H. Berrouane, Chantal Khan Malek, Jean-Michel Andre, L. Lesterlin, F. Ladan, Jean-Rene Rivoira, Yves Lepetre, Robert Barchewitz
Proceedings Volume 1343, (1991) https://doi.org/10.1117/12.23230
KEYWORDS: Diffraction gratings, Diffraction, Mirrors, Multilayers, Astronomical imaging, X-ray optics, X-ray astronomy, Astronomy, Microscopy, Polarimetry

SPIE Journal Paper | 1 June 1990
Chantal Khan Malek, Jean Susini, A. Madouri, M. Ouahabi, Jean-Rene Rivoira, F. Ladan, Yves Lepetre, Robert Barchewitz
OE, Vol. 29, Issue 06, (June 1990) https://doi.org/10.1117/12.10.1117/12.55634
KEYWORDS: Multilayers, X-rays, Mirrors, Beam splitters, X-ray characterization, Thin film deposition, Optical lithography, Anisotropic etching, Etching, Silicon carbide

Showing 5 of 26 publications
Conference Committee Involvement (8)
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV
10 December 2008 | Melbourne, Australia
Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
5 December 2007 | Canberra, ACT, Australia
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
11 December 2006 | Adelaide, Australia
Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
12 December 2005 | Brisbane, Australia
Smart Sensors, Actuators, and MEMS II
9 May 2005 | Sevilla, Spain
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
13 December 2004 | Sydney, Australia
Device and Process Technologies for Microelectronics, MEMS, and Photonics
10 December 2003 | Perth, Australia
Smart Sensors, Actuators, and MEMS
19 May 2003 | Maspalomas, Gran Canaria, Canary Islands, Spain
Showing 5 of 8 Conference Committees
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