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Cheng Liao
at Wuhan Univ of Science and Technology
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Publications (2)
Proceedings Article | 16 August 2024 Paper
Analysis of scattering field characteristics for particles on coated wafer
Lijuan Zheng, Shuang Xu, Cheng Liao
Proceedings Volume 13231, 132310G (2024) https://doi.org/10.1117/12.3040107
KEYWORDS: Particles, Scattering, Semiconducting wafers, Polarization, Mie scattering, Light scattering, Rayleigh scattering, Incident light, Reflection, Defect detection
Proceedings Article | 20 December 2019 Paper
Particle scattering field calculation and analysis based on Mie scattering theory
Proceedings Volume 11209, 112094N (2019) https://doi.org/10.1117/12.2549918
KEYWORDS: Light scattering, Particles, Scattering, Mie scattering, Semiconducting wafers, Polarization, Diffraction, Defect detection, Laser scattering, Rayleigh scattering
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