Mr. Chris Hakala Profile

Chris Hakala

at Thermo Fisher Scientific Inc

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 27 April 2023 Poster + Paper

Michael Strauss, Chen Li, Chris Hakala, Xiaoting Gu, Antonio Mani, Zhenxin Zhong

Proceedings Volume 12496, 1249639 (2023) https://doi.org/10.1117/12.2658795

KEYWORDS: Metrology, Etching, Silicon, Nanosheets, Gallium arsenide, 3D metrology, Machine learning, Nitrogen, Process modeling, Automation

Proceedings Article | 26 March 2019 Presentation + Paper

Hayley Johanesen, Michael Strauss, Anne Kenslea, Chris Hakala, Laurens Kwakman, Werner Boullart, Hans Mertens, Yong Kong Siew, Kathy Barla

Proceedings Volume 10959, 109591C (2019) https://doi.org/10.1117/12.2514995

KEYWORDS: Metrology, Scanning transmission electron microscopy, Nanowires, Silicon, Signal to noise ratio, 3D metrology

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