Dr. Christopher D. Sheraw Profile

Dr. Christopher D. Sheraw

at IBM Thomas J Watson Research Ctr

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 10 April 2024 Presentation + Paper

EUV patterned gate variation reduction in next generation transistor architectures

Gopal Sankar Kenath, Martin Burkhardt, Nikhil Jain, Anna Lin, Jennifer Church, Gen Tsutsui, Stephanie Reynoso, Xuan Liu, Chris Sheraw, Pietro Montanini, Eric Miller, Indira Seshadri, Luciana Meli, Nelson Felix

Proceedings Volume 12953, 1295305 (2024) https://doi.org/10.1117/12.3012023

KEYWORDS: Line width roughness, Light sources and illumination, Nanoimprint lithography, Optical lithography, Line edge roughness, Etching, Transistors, Extreme ultraviolet, Reactive ion etching, Extreme ultraviolet lithography

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Proceedings Article | 29 March 2006 Paper

Silicon containing polymer in applications for 193-nm high-NA lithography processes

Sean Burns, Dirk Pfeiffer, Arpan Mahorowala, Karen Petrillo, Alexandera Clancy, Katherina Babich, David Medeiros, Scott Allen, Steven Holmes, Michael Crouse, Colin Brodsky, Victor Pham, Yi-Hsiung Lin, Kaushal Patel, Naftali Lustig, Allen Gabor, Christopher Sheraw, Phillip Brock, Carl Larson

Proceedings Volume 6153, 61530K (2006) https://doi.org/10.1117/12.657197

KEYWORDS: Silicon, Reflectivity, Etching, Photoresist materials, Polymers, Lithography, Oxides, Silicon films, Reactive ion etching, Optical lithography

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Proceedings Article | 21 December 2001 Paper

Improved organic thin film transistor performance using chemically modified gate dielectrics

David Gundlach, Chung-Chen Kuo, Chris Sheraw, Jonathan Nichols, Thomas Jackson

Proceedings Volume 4466, (2001) https://doi.org/10.1117/12.451466

KEYWORDS: Dielectrics, Silicon, Silica, Silicon films, Thin films, Organic semiconductors, Transistors, Electronics, Atomic force microscopy, Polymers

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