Mr. Christian Görner Tenorio Profile

Christian Görner Tenorio

at Technische Univ. Ilmenau

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Publications (1)

Proceedings Article | 15 August 2023 Presentation + Paper

Double-pass modulated differential confocal microscopy for closed-loop axial control of direct laser writing

Johannes Belkner, Jaqueline Stauffenberg, Christian Görner Tenorio, Ingo Ortlepp, Eberhard Manske

Proceedings Volume 12618, 126180R (2023) https://doi.org/10.1117/12.2673874

KEYWORDS: Confocal microscopy, Modulation, Microscopes, Interferometers, Manufacturing, Lithography, Aspheric lenses, Signal detection, Field programmable gate arrays, Optical metrology, 3D profilers

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