Dr. Detlef Hofmann
Lithography Engineer at Infineon Technologies Dresden
SPIE Involvement:
Author
Publications (13)

Proceedings Article | 13 March 2018 Paper
Gerd Krause, Detlef Hofmann, Boris Habets, Stefan Buhl, Manuela Gutsch, Alberto Lopez-Gomez, Xaver Thrun
Proceedings Volume 10585, 105852C (2018) https://doi.org/10.1117/12.2302972
KEYWORDS: Resistance, Etching, Semiconducting wafers, Copper, Chemical mechanical planarization, Oxides, Critical dimension metrology, Metals, Scatter measurement, Scatterometry

Proceedings Article | 13 March 2018 Paper
Gerd Krause, Detlef Hofmann, Boris Habets, Stefan Buhl, Manuela Gutsch, Alberto Lopez-Gomez, Wan-Soo Kim, Xaver Thrun
Proceedings Volume 10585, 105852T (2018) https://doi.org/10.1117/12.2302971
KEYWORDS: Critical dimension metrology, Oxides, Capacitance, Semiconducting wafers, Etching, Metals, Resistance, Copper, Photomasks, Chemical mechanical planarization

Proceedings Article | 28 March 2017 Presentation + Paper
Detlef Hofmann, Frank Rabe, Stefan Buhl, Wan-Soo Kim, Boris Habets
Proceedings Volume 10145, 101450E (2017) https://doi.org/10.1117/12.2257963
KEYWORDS: Distortion, Overlay metrology, Process control, Virtual reality, Metrology, Environmental sensing, Front end of line, Back end of line, Reliability, Statistical analysis, Semiconducting wafers, Model-based design, Metals, Data modeling, Optical alignment

Proceedings Article | 26 March 2015 Paper
Nicoló Morgana, Dmitrii Gavrilin, Andreas Greiner, Detlef Hofmann, Itaru Kamohara, Ulrich Klostermann, Holger Moeller, Juergen Preuninger
Proceedings Volume 9426, 94260S (2015) https://doi.org/10.1117/12.2086075
KEYWORDS: Optical alignment, Semiconducting wafers, Signal processing, Silicon, Oxides, Computer simulations, Manufacturing, Visualization, Metals, Etching

Proceedings Article | 24 March 2006 Paper
Proceedings Volume 6152, 61522B (2006) https://doi.org/10.1117/12.653360
KEYWORDS: Aluminum, Overlay metrology, Process control, Etching, Semiconducting wafers, Data modeling, Lithography, Metrology, Sputter deposition, Metals

Showing 5 of 13 publications
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