Dr. Eduardo Margallo-Balbás
CEO at Ommatidia LIDAR S.L.
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 27 April 2016 Paper
A. Jovic, G. Pandraud, K. Zinoviev, J. Rubio, E. Margallo, P. Sarro
Proceedings Volume 9888, 98880C (2016) https://doi.org/10.1117/12.2227898
KEYWORDS: Microlens, Silicon, Photoresist materials, Optical coherence tomography, Etching, Plasma etching, Image quality, Semiconducting wafers, Tomography, Infrared imaging, Photoresist processing, Surface roughness, Oxides, Dry etching, Thermal oxidation

SPIE Journal Paper | 22 November 2012
JNP, Vol. 6, Issue 01, 063530, (November 2012) https://doi.org/10.1117/12.10.1117/1.JNP.6.063530
KEYWORDS: Waveguides, Silicon carbide, Refractive index, Plasma enhanced chemical vapor deposition, Biological and chemical sensing, Silicon, Sensors, Oxides, Wave propagation, Interfaces

Proceedings Article | 1 May 2012 Paper
Grégory Pandraud, Agung Purniawan, Eduardo Margallo-Balbás, Pasqualina Sarro
Proceedings Volume 8424, 84242P (2012) https://doi.org/10.1117/12.922400
KEYWORDS: Waveguides, Silicon carbide, Plasma enhanced chemical vapor deposition, Atomic layer deposition, Sensors, Refractive index, Absorption, Silicon, Silica, Titanium dioxide

Proceedings Article | 15 May 2010 Paper
Proceedings Volume 7715, 771509 (2010) https://doi.org/10.1117/12.853686
KEYWORDS: Silicon carbide, Waveguides, Optical coherence tomography, Plasma enhanced chemical vapor deposition, Birefringence, Dispersion, Refractive index, Cladding, Silica, Semiconducting wafers

Proceedings Article | 28 February 2008 Paper
Proceedings Volume 6847, 68470S (2008) https://doi.org/10.1117/12.766797
KEYWORDS: Silicon, Optical coherence tomography, Waveguides, Platinum, Temperature metrology, Oxides, Silicon photonics, Semiconducting wafers, Resistance, Photonic integrated circuits

Showing 5 of 9 publications
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