A combination of a cylindrical lens with a spherical lens was used to create an elliptical beam shape on the surface of the processed workpieces in order to increase the ablation efficiency producing linear grooves. Near-infrared 8 ps laser pulses with energies of up to 2.3 mJ were applied at a repetition rate of 300 kHz to ablate the grooves on the surface of the samples. The ablation rates obtained at different feed rates were examined. At a peak fluence of 4 J/cm2, an power specific ablation rate of almost 0.4 mm3/min/W was achieved for a beam with an ellipticity of 0.9955.
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