Mr. Ewoud Vreugdenhil Profile

Ewoud Vreugdenhil

at ASML Netherlands BV

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Proceedings Article | 19 March 2008 Paper

Yield aware design of gate layer for 45 nm CMOS-ASIC using a high-NA dry KrF systems

Ewoud Vreugdenhil, Harold Benten, Liesbeth Reijnen, Gerald Dicker, Jan-Willem Gemmink, Frank Bornebroek

Proceedings Volume 6925, 69250D (2008) https://doi.org/10.1117/12.771998

KEYWORDS: Photomasks, Optical lithography, Nanoimprint lithography, Transistors, Lithography, Curium, Printing, Field effect transistors, Scanners, Semiconducting wafers

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If the minimum die area is the main objective of an ASIC application, then each critical layer will have bi-directional mask layout. Then advanced litho technology is required to print the layers with single exposure lithography. If however yield, electrical robustness and variability have higher priority than minimum die area, than unidirectional patterning can be a good alternative. However, then the bi-directional layout of, especially the active area- and gate-layer, must be redesigned in an unidirectional layout (at the expense of a larger cell-area). Moreover, if a design split in two orthogonal unidirectional layouts can be made then the so-called cut-mask technology can be used: this is a (well-known) double patterning technology. This paper discusses three different cut-mask compatible redesigns of the gate-layer of a complex flip-flop cell, to be used in robust, low-cost low-power CMOS-logic applications with 45 nm ground rules and 180 nm device pitches. The analogue circuit simulator from Cadence has been used. The results obtained with ASML's lithography simulator, "Litho Cruiser", show that cut-mask patterning gives superior CD- and end-of-line control and enables Design Rules with less Gate-Overlap. This again gives the circuit-designer more design freedom for choosing the transistor width. Furthermore, the cut-mask compatible layouts can even be processed with high-NA dry KrFlithography instead of advanced single exposure ArFi lithography. The designs are compared with a reference design which is a traditional minimum area design with bi-directional layout.

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