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In our premises in Aubagne, CILAS has implemented a large dimension in-line magnetron sputtering coating machine with which such silver coatings are realized. This equipment with oversized dimensions involving a 6 meters by 3 meters vacuum chamber, 12 turbomolecular pumps and 7 planar magnetrons over 2.50m long will be presented in detail. In particular, the wide range of configurations will also be illustrated with complex coatings achievements with respect to the capability of the machine which is equipped with magnetrons, that may be powered in Radio Frequency, Mid Frequency, Direct Current or pulsed Direct Current modes.
For several years, CILAS has improved its coating processes to produce high quality silver coatings, taking into account spectral performances, environmental conditions and also coating uniformity over 2meter by 2 meter dimensions.
Further developments have been led by CILAS with the support of the French Space Agency as part of Research and Development activities to improve environmental performance; we present here characterization results on samples before and after environmental qualification (temperature, humidity, vacuum heat ...) and on components with dimensions up to 600mm. A multi-year test campaign including stress measurements and adhesion tests on samples and mirror demonstrator will also be presented.
Variable filters are obtained upon the variation of the thickness of some or all the layers deposited on the substrate. The layers are deposited using a Bühler HELIOS machine in order to benefit from the high stability of the deposition process. To insure a non-uniformity of the deposited layers, adapted masks are placed in front of the targets for the low and high refractive index materials. The uniformity of these layers is measured via a custom set-up allowing a local measurement of the transmission to perform a mapping of the transmission over the whole component aperture.
In this paper, we present the fabrication of layers and filters with variable thickness. Various types of thickness gradients are presented.
The main achievements reached during these activities have been:
- to evaluate by design, manufacturing and test of LVF samples the achievable performances compared with target requirements;
- to evaluate the reliability of the projects by analyzing their repeatability;
- to define suitable measurement methodologies
We will give first a description of the structure of these filters completed by a presentation of their manufacturing procedure, then a detailed description of our experimental set-up, and at the end a presentation of the results of our measurements on these two specific narrow bandpass filters.
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