Mr. Geng Yang Profile

Geng Yang

at National Univ of Singapore

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Publications (2)

Proceedings Article | 2 April 2010 Paper

Monitoring and control of photoresist properties and CD during photoresist processing

Geng Yang, Yit-Sung Ngo, Andi Putra, Kar-Tien Ang, Arthur Tay, Zhong-Ping Fang

Proceedings Volume 7638, 763828 (2010) https://doi.org/10.1117/12.846560

KEYWORDS: Semiconducting wafers, Photoresist materials, Lithography, Critical dimension metrology, Spectroscopy, Photoresist processing, Manufacturing, Process control, Sensors, Resistance

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Proceedings Article | 14 December 2009 Paper

In-situ monitoring and control of photoresist parameters during thermal processing in the lithography sequence

Xiaodong Wu, Geng Yang, Ee-Xuan Lim, Arthur Tay

Proceedings Volume 7520, 752035 (2009) https://doi.org/10.1117/12.847879

KEYWORDS: Semiconducting wafers, Photoresist materials, Mass attenuation coefficient, Lithography, Spectroscopy, Reflectivity, Microelectronics, Process control, Signal attenuation, Control systems

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