Dr. Gim S. Chen Profile

Dr. Gim S. Chen

Sr. Process Engineer at AKrion LLC

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Publications (1)

Proceedings Article | 17 December 2003 Paper

Immersion system process optimization for 248-nm and 193-nm photomasks: binary and EAPSM

Gim Chen, Julio Reyes, James Wood, Ismail Kashkoush, Laurent Dieu, Richard Novak

Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.518247

KEYWORDS: Photomasks, Transmittance, Reticles, Chemistry, Photoresist processing, Binary data, Mask cleaning, Reflectivity, Photoresist materials, Particles

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