Dr. Gregory W. Auner Profile

Dr. Gregory W. Auner

Professor at Wayne State Univ

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Author

Publications (16)

Proceedings Article | 31 December 2009 Paper

Surface damage of thin AlN films with increased oxygen content by nanosecond and femtosecond laser pulses

Vitaly Gruzdev, Ildar Salakhutdinov, J. Chen, Yuriy Danylyuk, Erik McCullen, Gregory Auner

Proceedings Volume 7504, 750404 (2009) https://doi.org/10.1117/12.836865

KEYWORDS: Aluminum nitride, Oxygen, Laser induced damage, Femtosecond phenomena, Laser damage threshold, Thin films, Contamination, Laser ablation, Nano opto mechanical systems, Sapphire

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Proceedings Article | 24 February 2009 Paper

Ablation of aluminum nitride films by nanosecond and femtosecond laser pulses

Vitaly Gruzdev, Robert Tzou, Ildar Salakhutdinov, Yuriy Danylyuk, Erik McCullen, Gregory Auner

Proceedings Volume 7201, 72011B (2009) https://doi.org/10.1117/12.809265

KEYWORDS: Laser ablation, Femtosecond phenomena, Aluminum nitride, Oxygen, Atomic force microscopy, Nano opto mechanical systems, Aluminum, Nitrogen, Thermal effects, Ionization

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Proceedings Article | 24 February 2009 Paper

Diffraction gratings for compact integrated optical structures

Ildar Salakhutdinov, Gregory Auner

Proceedings Volume 7205, 72050O (2009) https://doi.org/10.1117/12.809029

KEYWORDS: Diffraction gratings, Diffractive optical elements, Electron beam lithography, Spectroscopy, Integrated optics, Spectral resolution, Etching, Holography, Waveguides, Photoresist materials

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Proceedings Article | 16 April 2008 Paper

Development of an extendable arm and software architecture for autonomous and tele-operated control for mobile platforms

Yung-Sen Li, Shawn Hunt, Cosmin Popovici, Steven Walter, Gary Witus, R. Darin Ellis, Gregory Auner, Alex Cao, Abhilash Pandya

Proceedings Volume 6962, 69621U (2008) https://doi.org/10.1117/12.778059

KEYWORDS: Sensors, Cameras, Inspection, Video, Control systems, Prototyping, Microcontrollers, Electromechanical design, Wireless communications, Software development

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Proceedings Article | 15 October 2007 Paper

Integration of new communications and mast subsystems on an Omni-Directional Inspection Robot (ODIS)

Shawn Hunt, Yung-Sen Li, Gary Witus, Steven Walter, R. Darin Ellis, Gregory Auner, Alex Cao, Abhilash Pandya

Proceedings Volume 6736, 67360A (2007) https://doi.org/10.1117/12.738078

KEYWORDS: Inspection, Data modeling, Cameras, Video, Sensors, Calibration, Motion models, Electromechanical design, Data communications, Control systems

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Proceedings Article | 27 May 2005 Paper

Localized heating/bonding techniques in MEMS packaging

J. Mabesa, A. Scott, X. Wu, G. Auner

Proceedings Volume 5804, (2005) https://doi.org/10.1117/12.604579

KEYWORDS: Microelectromechanical systems, Packaging, Sensors, Reliability, Thermography, Microsystems, Unmanned ground vehicles, Telecommunications, System integration, Control systems

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Proceedings Article | 12 April 2005 Paper

Optical properties of pulsed-laser deposited BaTiO₃ thin films

Jie Xu, Daniel Durisin, Gregory Auner

Proceedings Volume 5713, (2005) https://doi.org/10.1117/12.584639

KEYWORDS: Silicon, Silica, Refractive index, Optical properties, Absorption, Transmittance, Thin films, Ultraviolet radiation, Crystals, X-ray diffraction

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Proceedings Article | 7 December 2004 Paper

Fabrication of a waveguide for biomedical applications using novel micromachining techniques

Mona Safadi, Andrew Scott, Jagdish Thakur, Gregory Auner

Proceedings Volume 5588, (2004) https://doi.org/10.1117/12.571718

KEYWORDS: Aluminum nitride, Waveguides, Laser ablation, Thin films, Sapphire, Excimer lasers, Micromachining, Plasma, Crystals, Pulsed laser operation

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Proceedings Article | 15 July 2004 Paper

Stoichiometric and structural properties of pulsed-laser deposited BaTiO3 thin films on silicon

Jie Xu, Daniel Durisin, Gregory Auner

Proceedings Volume 5339, (2004) https://doi.org/10.1117/12.525456

KEYWORDS: Oxygen, Thin films, Silicon, Atomic force microscopy, Crystals, X-ray diffraction, Thin film deposition, Ferroelectric materials, Barium, Silicon films

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Proceedings Article | 15 July 2004 Paper

Laser microjoining of dissimilar and biocompatible materials

Ingo Bauer, Ulrich Russek, Hans Herfurth, Reiner Witte, Stefan Heinemann, Golam Newaz, A. Mian, D. Georgiev, Gregory Auner

Proceedings Volume 5339, (2004) https://doi.org/10.1117/12.530239

KEYWORDS: Glasses, Titanium, Metals, Polymers, Interfaces, Semiconductor lasers, Silicon, Laser bonding, Ceramics, Biomedical optics

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Proceedings Article | 30 September 2003 Paper

Equipping small robotic platforms with highly sensitive more accurate nuclear, biological, and chemical (NBC) detection systems

Andrew Scott, Jose Mabesa, Chantelle Hughes, David Gorsich, Gregory Auner

Proceedings Volume 5083, (2003) https://doi.org/10.1117/12.497541

KEYWORDS: Sensors, Robotics, Biological detection systems, Inspection, Chemical analysis, Biological research, Acoustics, Robots, Biological weapons, Microelectromechanical systems

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Proceedings Article | 18 April 2003 Paper

Dual-mode acoustic wave biosensors microarrays

Gregory Auner, Gina Shreve, Hao Ying, Golam Newaz, Chantelle Hughes, Jianzeng Xu

Proceedings Volume 5119, (2003) https://doi.org/10.1117/12.499097

KEYWORDS: Sensors, Acoustics, Pathogens, Aluminum nitride, Liquids, Biosensors, Proteins, Micromachining, Bacteria, Environmental sensing

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Proceedings Article | 17 January 2003 Paper

Development of a microfluidic drug delivery neural prosthesis using a wide-bandgap semiconductor waveguide structure

Mona Safadi, Gregory Auner, Raymond Iezzi, Pat McAllister, Gary Abrams

Proceedings Volume 4982, (2003) https://doi.org/10.1117/12.478158

KEYWORDS: Waveguides, Aluminum nitride, Microfluidics, Sapphire, Laser ablation, Thin films, Micromachining, Wide bandgap semiconductors, Plasma, Excimer lasers

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Proceedings Article | 10 June 2002 Paper

Characterization of pulsed-laser deposited BaTiO3 thin films

Jie Xu, Daniel Durisin, Qian Zhao, Gregory Auner

Proceedings Volume 4647, (2002) https://doi.org/10.1117/12.469825

KEYWORDS: Thin films, Silica, Ultraviolet radiation, Transmittance, Silicon, Thin film deposition, Spectroscopy, Ferroelectric materials, Crystals, Reflectivity

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Proceedings Article | 7 June 2002 Paper

Nondestructive evaluation of bonding characteristics of TiO2-Al2O3 gas sensor

Bin Feng, Golam Newaz, Gregory Auner, Sheikh Akbar, A. Merhaba

Proceedings Volume 4703, (2002) https://doi.org/10.1117/12.469628

KEYWORDS: Sensors, Thermography, Nondestructive evaluation, Gas sensors, Thin films, Computing systems, Infrared imaging, Interfaces, Actuators, Ceramics

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Proceedings Article | 14 July 1995 Paper

Characterization of aluminum nitride thin films grown by plasma source molecular-beam epitaxy

Gregory Auner, Pao-Kuang Kuo, Y. Lu, Zhouling Wu

Proceedings Volume 2428, (1995) https://doi.org/10.1117/12.213750

KEYWORDS: Thin films, Silicon, Aluminum nitride, Plasma, Thermography, Atomic force microscopy, Solids, Epitaxy, Aluminum, Crystals

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Showing 5 of 16 publications

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