3D structures made out of glass can be used in various fields starting from optical components or microfluidic devices to micromechanics. Selective laser etching (SLE) is a unique technology that allows the production of low surface roughness (around 200 nm RMS) and a high aspect ratio (around 1000) 3D structures. However, some advanced applications as biomedical microfluidics and optical devices require to increase these aspects. In this work, we present SLE technological improvements towards better surface roughness and higher aspect ratio structures. Chemical etching process improvements enable to increase selectivity up to 3000 which ameliorates the accuracy and possible aspect ratio of the structures.
Here, we describe progress made in the field of additive manufacturing “unchained” via post processing of composites. Hybrid prepolymers are known for their usefulness in forming complex micro-/nano- devices using various forms of laser lithography. They contain metal-oxide constituents and are special for their sol-gel form, relatively low shrinkage and high laser damage threshold (LIDT) properties during/after exposure. Yet, there is one more new property that can be induced due to their special composition: present metal and oxide elements can form into a purely inorganic glass or ceramic lattices in a heat-treatment process without the loss of the previous geometry. This area of research recently gained rapid traction and is coming into fruition as an enabler of full 3D nanophotonics, micro-optics, medical devices and more. This is due to fact that new materials can be produced with a simple process, resulting in increased refractive index and LIDT, together with inertness.
Direct laser writing (DLW) based on the femtosecond (fs) pulse-induced light-matter interaction expanded considerably during the last decades. The key advantage of using fs lasers for DLW is the possibility to exploit various nonlinear light-matter interaction regimes as well as control the thermal aspect of the process. This work is dedicated to exploring the capabilities of expanding DLW in several possible biomedical application areas where fs lasers could yield a very attractive, high throughput solution. Namely, we will be discussing how hybrid additive-subtractive DLW can be exploited for the high-throughput fabrication of integrated microfluidic systems. Furthermore, a mechanical flexible scaffold will be presented. Finally, a possibility to produce very high precision metalized 3D structures by using pre-existing high-throughput multi-photon polymerization capabilities will be shown. In all cases, attention will be placed on the unique capabilities of fs-lasers in DLW as well as practical considerations of the processes and their up-scaling.
Here we report on the laser manufacturing of glass true 3D micro-optics. We demonstrate the feasibility of producing individual free-form geometry elements such as lenses, prisms, gratings proving the potential of integration into monolith stacked components. This is achieved by combining ultrafast laser 3D nanolithography and subsequent thermal post-treatment (calcination) - a novel approach introduced for additive manufacturing of inorganic materials [Nanoscale Horiz. 4, 647 (2019)]). The laser made pristine micro-optical components maintain their predefined shape while material is converted from hybrid polymer to glass corresponding to its inherent refractive index and transparency. This approach enables both realization of complex geometries and variation of material properties simultaneously.
Femtosecond laser surface patterning is a powerful tool capable of producing hierarchical surface features with possible applications in various scientific and industrial fields. In this work, we investigate several piratical aspects of this technology. Contact angle modification for several various materials is investigated, highlighting how it can be changed from superhydrophobic to superhydrophobic. This is followed up by an inquiry into the possibility to use laser patterned surfaces for friction control. Finally, we investigate the influence of chemical polishing on surface chemistry and topography. It is relevant for possible uses in medicine. Overall, shown results give important insights into the practical implementation aspect of the produced surface patterns.
Ceramics play an important role in today’s science and industry as it can withstand immense thermal, mechanical, chemical and other hazards. In recent years, the interest in 3D printing micro- or even nano-structures out of ceramics has been growing rapidly. Therefore, direct laser writing by two photon polymerization together with calcination have been proved to be a powerful tool for the fabrication of fully 3D glass-ceramic objects in micro- and nano-scale [1]. However, producing such structures with unique properties at meso scale (features from nm to cm overall size) is one of the greatest challenges [2]. In order to overcome it the composition of the starting materials and as well as conditions of calcination have to be fully understood and enhanced.
We synthesized a series of organic-inorganic polymer precursors via sol-gel method varying the molar ratio of silicon (Si) and zirconium (Zr) complexes (Si:Zr, where Si=9; 8; 7; 6; 5 and Zr=1; 2; 3; 4; 5) [3] and investigated 3D processing of these materials. The study shows that the “glassy” phase structures retain their shape without any distortion. Furthermore, calcination provides a route for the continuous size control and formation of a variety of phase transformation for free-form nano-/micro-objects. It is shown that due to the isotropic nature of the shrinkage during calcination fabricated 3D objects retain complex geometry. Nano-woodpiles, bulk-woodpile hybrids and full bulk structures are formed. The sizes of single features in these objects vary from 120 nm to 800 nm with overall size going to 30 µm. Finally, changes in focused ion beam machining rates between standard and calcinated materials are shown proving enhanced resiliency of the final product (up to 50%).
[1] Gailevičius, D., et al., Additive-manufacturing of 3D glass-ceramics down to nanoscale resolution. Nanoscale Horiz.;
4, 647-651; (2019)
[2] L. Jonusauskas, D. Gailevicius, S. Rekstyte, T. Baldacchini, S. Juodkazis, M. Malinauskas, Mesoscale Laser 3D Printing, Opt. Express
27 (11), 15205-15221 (2019)
[3] Ovsianikov, A., et al., Ultra-Low Shrinkage Hybrid Photosensitive Material for Two-Photon Polymerization Microfabrication. ACS Nano; 2(11), 2257-2262; (2008)
Ultrafast laser lithography allows additive fabrication of 3D sub-micrometric size objects in various materials. Here we demonstrate significant new capabilities achievable with this approach by using hybrid organic–inorganic material as the initial medium for laser structuring, and adding a high-temperature post-fabrication treatment. Calcination at temperatures of up to 1500°C leads to decomposition of the organic component in the initial material, and sintering of the inorganic component into a stable matrix. This results in the final object composed purely of glass-ceramic material, and having volume and size significantly reduced in comparison to those of the initial object. Possibilities to control both the composition and degree of the thermal down-scaling will be demonstrated. The proposed new pathway to inorganic 3D nanoscale objects and structures is easy to implement, and allows one to significantly surpass the spatial resolution and feature size achievable using laser lithography only. We study optical properties of transparent inorganic microstructures and optimize them for specific photonic functions. In the future it may be useful in space and defense-related areas for realization of chemically and thermally resilient photonic components, such as narrow-band IR emitters and optical sensors to be used in nuclear power plants and other harsh environments.
Reference
D. Gailevicius, V. Padolskyte, L. Mikoliunaite, S. Sakirzanovas, S. Juodkazis, and M. Malinauskas, ”Additive-Manufacturing of 3D Glass-Ceramics down to Nanoscale Resolution,” Nanoscale Horiz., 10.1039/C8NH00293B (2019), online first.
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