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Guido Thielscher
Sales Director at FUJIFILM Electronic Materials (Europe) GmbH
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Publications (1)
Proceedings Article | 2 June 2004 Paper
Contact layer printing using alternating phase-shifting masks: mask making, patterning results, and production implementation
Proceedings Volume 5504, (2004) https://doi.org/10.1117/12.568032
KEYWORDS: Manufacturing, Overlay metrology, Photomasks, Etching, Phase shifts, Scanners, Critical dimension metrology, Quartz, Mask making, Optical lithography
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