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Hang Fan
at Lanzhou Univ of Technolog
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Author
Publications (2)
Proceedings Article | 18 December 2019 Paper
Improvement of CDU in implant level lithography with high topography
Proceedings Volume 11337, 1133706 (2019) https://doi.org/10.1117/12.2541028
KEYWORDS: Nanoimprint lithography, Lithography, Photomasks, Far-field diffraction, Fourier optics, Critical dimension metrology, Semiconducting wafers, Manufacturing, Numerical simulations
Proceedings Article | 28 February 2017 Paper
Simultaneous measurement of temperature and strain based on a fiber Bragg grating with cladding made of electro-optic crystal material
Proceedings Volume 10256, 102565I (2017) https://doi.org/10.1117/12.2249855
KEYWORDS: Fiber Bragg gratings, Temperature metrology, Electro optics, Crystals, Cladding, Sensors, Optical fibers, Optical sensing
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