Mr. Hari Konnanur Profile

Hari Konnanur

at Synopsys Inc

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Publications (3)

Proceedings Article | 16 September 2022 Paper

An approach to building photomask CD SEM recipe for HOLON ZX using CATS

Herman Boerland, Anush Hovhannisyan, Mikhayil Mkrtchyan, Hari Konnanur, Mitsuya Toda, Mirai Anazawa

Proceedings Volume 12325, 123250S (2022) https://doi.org/10.1117/12.2640587

KEYWORDS: Computed tomography, Metrology, Holons, Scanning electron microscopy, Photomasks, Raster graphics, Critical dimension metrology, Human-machine interfaces, Vestigial sideband modulation, Manufacturing

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Proceedings Article | 23 August 2021 Paper

Model-driven rule-based mask process correction

Wai Yip Kwok, Johnny Yeap, Sebastian Munoz, Seurien Chou, Tokiharu Sekiya, Hari Konnanur

Proceedings Volume 11908, 1190806 (2021) https://doi.org/10.1117/12.2601035

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Proceedings Article | 26 September 2019 Paper

A case study of benefits for the "IOFF" MDP automation project: development, integration, and optimization of the Integrated-Optimized-Fracture-Flow (IOFF) into production

Adam Smith, Hari Konnanur

Proceedings Volume 11148, 111481L (2019) https://doi.org/10.1117/12.2539039

KEYWORDS: Computed tomography, Electronic design automation, Optical proximity correction, Operating systems, Data processing, Photomasks, Chemical elements

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