Prof. Harold Craighead Profile

Prof. Harold Craighead

at Cornell Univ

SPIE Involvement:

Author

Proceedings Article | 13 October 2005 Paper

Optical properties of zero mode waveguides

K. Samiee, H. Craighead

Proceedings Volume 5969, 59690W (2005) https://doi.org/10.1117/12.627980

KEYWORDS: Molecules, Waveguides, Luminescence, Fluorescence correlation spectroscopy, Optical properties, Diffusion, Metals, Fluorescence spectroscopy, Thin films, Diffraction

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Proceedings Article | 7 December 2004 Paper

Evanescent imaging ellipsometry based microarray readers

Srivatsa Venkatasubbarao, Neil Beaudry, Yanming Zhao, Russell Chipman

Proceedings Volume 5586, (2004) https://doi.org/10.1117/12.606790

KEYWORDS: Prisms, Refractive index, Glasses, Calibration, Thin films, Ellipsometry, Polarization, Statistical analysis, Imaging systems, Biological research

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Proceedings Article | 24 January 2004 Paper

Resistively actuated micromechanical dome resonators

Robert Reichenbach, Maxim Zalaludinov, Keith Aubin, David Czaplewski, Bojan Ilic, Brian Houston, Harold Craighead, Jeevak Parpia

Proceedings Volume 5344, (2004) https://doi.org/10.1117/12.524175

KEYWORDS: Resonators, Domes, Oscillators, Resistors, Signal detection, Microelectromechanical systems, Frequency modulation, Actuators, Fermium, Transceivers

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We demonstrate dome-shaped, radio frequency, micromechanical resonators with integrated thermo-elastic actuators. Such resonators can be used as the frequency-determining element of a local oscillator or as a combination of a mixer and IF filter in a superheterodyne transceiver. The dome resonators (shallow shell segments clamped on the periphery) are fabricated utilizing pre-stressed thin polysilicon film over sacrificial silicon dioxide. The shell geometry enhances the rigidity of the structure, providing a resonant frequency several times higher than a flat membrane of the same dimensions. The finite curvature of the shell also couples out-of-plane deflection with in-plane stress, providing an actuation mechanism. Out-of-plane motion is induced by employing non-homogeneous, thermomechanical stress, generated in plane by local heating. A metal resistor, lithographically defined on the surface of the dome, provides thermal stress by dissipating 4 μW of Joule heat. The diminished heat capacity of the MEMS device enables a heating/cooling rate comparable to the frequency of mechanical resonance and allows operation of the resonator by applying AC current through the microheater. Resistive actuation can be readily incorporated into integrated circuit processing and provides significant advantages over traditional electrostatic actuation, such as low driving voltages, matched 50-ohm impedance, and reduced cross talk between drive and detection. We show that when a superposition of two AC signals is applied to the resistive heater, the driving force can be detected at combinatory frequencies, due to the fact that the driving thermomechanical stress is determined by the square of the heating current. Thus the thermoelastic actuator provides frequency mixing while the resonator itself performs as a high quality (Q~10,000) intermediate frequency filter for the combinatory frequencies. A frequency generator is built by closing a positive feedback loop between the optical detection of the mechanical motion of the dome and the resistive drive. We demonstrate self-sustained oscillation of the dome resonator with frequency stability of 1.5 ppm and discuss the phase noise of the oscillator.

Proceedings Article | 24 April 2003 Paper

Laser annealing for high-Q MEMS resonators

Keith Aubin, Maxim Zalalutdinov, Robert Reichenbach, Brian Houston, Alan Zehnder, Jeevak Parpia, Harold Craighead

Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.499109

KEYWORDS: Microelectromechanical systems, Resonators, Annealing, Oscillators, Oxides, Silicon, Laser resonators, Helium neon lasers, Electronics, Etching

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Proceedings Article | 24 April 2003 Paper

Shell-type micromechanical oscillator

Maxim Zalalutdinov, Keith Aubin, Christopher Michael, Robert Reichenbach, Tuncay Alan, Alan Zehnder, Brian Houston, Jeevak Parpia, Harold Craighead

Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.499107

KEYWORDS: Resonators, Microelectromechanical systems, Oscillators, Modulation, Signal detection, Positive feedback, Phase shifts, Domes, Microresonators, Interferometry

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Proceedings Article | 2 October 2001 Paper

Light-activated self-generation and parametric amplification for MEMS oscillators

Maxim Zalalutdinov, Alan Zehnder, Anatoli Olkhovets, Stephen Turner, Lidija Sekaric, Bojan Ilic, Dave Czaplewski, Jeevak Parpia, Harold Craighead

Proceedings Volume 4561, (2001) https://doi.org/10.1117/12.443086

KEYWORDS: Oscillators, Modulation, Microelectromechanical systems, Silicon, Microopto electromechanical systems, Frequency modulation, Absorption, Continuous wave operation, Finite element methods, Microfabrication

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Proceedings Article | 28 September 2001 Paper

Polymeric microfluidic device for separation of small molecules

Jun Kameoka, Hongwei Zhong, Jack Henion, Harold Craighead

Proceedings Volume 4560, (2001) https://doi.org/10.1117/12.443062

KEYWORDS: Microfluidics, Molecules, Polymers, Mass spectrometry, Fluorescence spectroscopy, Glasses, Silicon, Photoresist materials, Oxygen, Plasma

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Proceedings Article | 5 April 2001 Paper

Light-induced parametric amplification in MEMS oscillators

Maxim Zalalutdinov, Anatoli Olkhovets, Alan Zehnder, Bojan Ilic, D. Czaplewcki, Jeevak Parpia, Harold Craighead

Proceedings Volume 4408, (2001) https://doi.org/10.1117/12.425400

KEYWORDS: Oscillators, Microelectromechanical systems, Modulation, Silicon, Interferometry, Finite element methods, Phase shifts, Continuous wave operation, Oxides, 3D modeling

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Proceedings Article | 18 August 2000 Open Access

From microfluidics to nanofluidics: DNA separation using nanofluidic entropic trap array device

Jongyoon Han, Harold Craighead

Proceedings Volume 4177, (2000) https://doi.org/10.1117/12.395654

KEYWORDS: Microfluidics, Biological research, Molecules, Control systems, Proteins, Biopolymers

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Proceedings Article | 26 March 1998 Paper

Fabrication of microcapillaries and waveguides for single molecule detection

Mathieu Foquet, Jongyoon Han, Alfred Lopez, Warren Wright, Harold Craighead

Proceedings Volume 3258, (1998) https://doi.org/10.1117/12.304373

KEYWORDS: Waveguides, Capillaries, Molecules, Silicon, Luminescence, Microfluidics, Glasses, Integrated optics, Optical fabrication, Oxides

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Proceedings Article | 26 March 1998 Paper

Monolithic fabrication of nanofluidic artificial gel media for DNA electrophoresis

Stephen Turner, Harold Craighead

Proceedings Volume 3258, (1998) https://doi.org/10.1117/12.304369

KEYWORDS: Silicon, Semiconducting wafers, Molecules, Etching, Oxides, Fabrication, Microfluidics, Dielectrics, Chemical vapor deposition, Wet etching

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Proceedings Article | 31 March 1997 Paper

Cell attachment on microscopically textured silicon surfaces

Stephen Turner, Lance Kam, Michael Isaacson, Harold Craighead, Donald Szarowski, James Turner, W. Shain

Proceedings Volume 2978, (1997) https://doi.org/10.1117/12.269978

KEYWORDS: Etching, Semiconducting wafers, Wet etching, Silicon, Scanning electron microscopy, Reactive ion etching, Confocal microscopy, Bioalcohols, Natural surfaces, Photoresist materials

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Proceedings Article | 3 June 1994 Paper

Binary optics for optical interconnects

Steven Shank, Harold Craighead

Proceedings Volume 2216, (1994) https://doi.org/10.1117/12.177332

KEYWORDS: Diffractive optical elements, Etching, Silicon, Reflectivity, Optical alignment, Reactive ion etching, Semiconducting wafers, Diffraction, Optical interconnects, Electron beam lithography

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