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Hengbo Li
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Publications (1)
Proceedings Article | 4 April 2023 Paper
Fabrication of deep-etched fused silica grating with high depth-to-width ratio by holograph and ion-beam etching
Manman Sun, Shuhu Huan, Zhiwen Chen, Hengbo Li, Liangcheng Yu, Keqiang Qiu
Proceedings Volume 12617, 1261738 (2023) https://doi.org/10.1117/12.2665859
KEYWORDS: Chromium, Photoresist materials, Photomasks, Diffraction gratings, Holography, Etching, Ion beams, Fabrication, Diffraction, Polarization
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