We present the most up to date advancements in production, design, and performance of the NexGen Micro-Shutter Array (NGMSA) for Multi-object Spectroscopy (MOS), intended for the future Habitable Worlds Observatory (HWO) Flagship. A microshutter array functions as a programmable slit mask, to generate slits corresponding to sparsely distributed sources in the field of view of a telescope. In contrast to the magnetic/electrostatic microshutter arrays used in the James Webb Space Telescope (JWST), the NGMSA is fully operated by electrostatics, simplifying overall system. Our small pilot array proved its capability from the FORTIS sounding rocket mission in 2019. As we are switching to a larger HWO flight size array process, we are encountering multiple processing related issues. Also, there has been individual shutter level issue that impairs operation and performance. We will discuss those problems and strategies to overcome the challenges to achieve an on/off contrast of >1e5 with near 100% shutter operability.
The optical coupling of detectors to telescope optics is a challenge for future far-infrared astrophysics observatories. The PRobe far-Infrared Mission for Astrophysics (PRIMA) collaboration has developed monolithic silicon microlens arrays for superconducting detector arrays spanning wavelengths from 24 to 261 microns. These custom-microfabricated lens arrays meet the stringent surface accuracy and roughness requirements that are necessary at PRIMA’s shortest wavelengths. Grayscale lithography is used in combination with deep silicon plasma etching to create arrays of three-dimensional lens profiles. This fabrication process generates highly uniform and accurate microlenses across a roughly 80 by 10 millimeter 1008-element array. The kilopixel microlens arrays are bonded to matching PRIMA detector arrays with a thin and uniform layer of epoxy. In this presentation, we report on the status and performance of PRIMA’s microlens fabrication and microlens-detector array hybridization processes.
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