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Dr. Iryna Titarenko
at Tower Semiconductor Ltd
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Publications (1)
Proceedings Article | 27 March 2007 Paper
Geometrical description of the microloading effect in silicon trench structures
Iryna Titarenko, Enna Altshuler, Rama Tweg
Proceedings Volume 6520, 65204D (2007) https://doi.org/10.1117/12.708892
KEYWORDS: Etching, Optical proximity correction, Silicon, Data modeling, Scanning electron microscopy, Calibration, Standards development, Mathematical modeling, Semiconducting wafers, Visual process modeling
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