Dr. Isao Matsushima Profile

Dr. Isao Matsushima

at AIST

SPIE Involvement:

Author

Publications (10)

Proceedings Article | 5 June 2008 Paper

10 kHz 54 W Ti:sapphire regenerative amplifier as a pumping laser of a laser-plasma x-ray source

Isao Matsushima, Hidehiko Yashiro, Toshihisa Tomie

Proceedings Volume 7022, 70220M (2008) https://doi.org/10.1117/12.803939

KEYWORDS: Resonators, Thermal effects, Amplifiers, Optical pumping, Rod lasers, Pulsed laser operation, Cryogenics, X-ray sources, X-rays, Laser applications

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Proceedings Article | 23 March 2006 Paper

EUV generation using a droplet of a suspension including tin as a target of a high-efficiency LPP source for high volume production

Toshihisa Tomie, - Sarjono, H. Yashiro, H. Moriwaki, I. Matsushima

Proceedings Volume 6151, 61511P (2006) https://doi.org/10.1117/12.656455

KEYWORDS: Extreme ultraviolet, Plasma, Tin, Particles, Extreme ultraviolet lithography, Plasma generation, Pulsed laser operation, Solids, Opacity, YAG lasers

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Proceedings Article | 20 May 2004 Paper

Particle-cluster tin target for a high-conversion efficiency LPP source for EUVL

Toshihisa Tomie, Tatsuya Aota, Jing Quan Lin, Yoshifumi Ueno, Hidehiko Yashiro, Noriaki Kandaka, Hiroki Moriwaki, Gohta Niimi, Isao Matsushima, Kentaro Nishigori

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.535395

KEYWORDS: Plasma, Particles, Tin, Extreme ultraviolet, Plasma generation, Extreme ultraviolet lithography, Pulsed laser operation, Solids, Mirrors, Ions

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Proceedings Article | 16 June 2003 Paper

Use of tin as a plasma source material for high conversion efficiency

Toshihisa Tomie, Tatsuya Aota, Yoshifumi Ueno, Gohta Niimi, Hidehiko Yashiro, Jingqian Lin, Isao Matsushima, Kazumasa Komiyama, Dong-Hoon Lee, Kentaro Nishigori, Hiroshi Yokota

Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.483751

KEYWORDS: Plasma, Tin, Extreme ultraviolet, Magnetism, Plasma generation, Solids, Particles, Extreme ultraviolet lithography, Xenon, Mirrors

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Proceedings Article | 23 April 2001 Paper

Numerical simulation of shockwave by KrF laser ablation

Susumu Kato, Kaori Kato, Takayuki Aoki, Ryuichi Ishizaki, Osamu Tatebe, Isao Matsushima, Eiichi Takahashi, Yoshiro Owadano

Proceedings Volume 4424, (2001) https://doi.org/10.1117/12.425608

KEYWORDS: Laser ablation, Optical simulations, Computer simulations, Numerical simulations, Laser irradiation, Plasma, Chlorine, Laser development, Fluid dynamics, Solids

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Proceedings Article | 23 April 2001 Paper

High-intensity pulse generation by saturated amplification of Stokes pulse with steep leading edge

Kenji Kuwahara, Eiichi Takahashi, Yuji Matsumoto, Isao Matsushima, Isao Okuda, Susumu Kato, Yoshiro Owadano

Proceedings Volume 4424, (2001) https://doi.org/10.1117/12.425582

KEYWORDS: Pulsed laser operation, Oscillators, Liquids, Laser amplifiers, Laser scattering, Scattering, Oscilloscopes, Laser damage threshold, Phonons, Reflectivity

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Proceedings Article | 11 January 2000 Paper

Electron-beam-pumped high-repetition-rate KrF laser system

Eiichi Takahashi, Isao Okuda, Yuji Matsumoto, Isao Matsushima, Susumu Kato, Kenji Kuwahara, Yoshiro Owadano

Proceedings Volume 3886, (2000) https://doi.org/10.1117/12.375130

KEYWORDS: Prototyping, Titanium, Switches, Gas lasers, Molybdenum, Fusion energy, Magnetism, Pulsed laser operation, Transmittance, Laser systems engineering

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Proceedings Article | 11 January 2000 Paper

Development of efficient forward Raman pulse compression system for e-beam-excited KrF laser ASHURA

Yuji Matsumoto, Eiichi Takahashi, Isao Matsushima, Isao Okuda, Yoshiro Owadano, Kenji Kuwahara

Proceedings Volume 3886, (2000) https://doi.org/10.1117/12.375129

KEYWORDS: Raman spectroscopy, Raman scattering, Mirrors, Optical amplifiers, Pulsed laser operation, Gases, Laser scattering, Scattering, Oscillators, Fusion energy

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