Mr. James Robert Profile

James Robert

at IBM Corp

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Publications (2)

Proceedings Article | 25 March 2008 Paper

Traceable calibration of AFM step height measurements for integrated circuit manufacturing

James Robert, Bill Banke, Ronald Dixson, Carlos Strocchia-Rivera

Proceedings Volume 6922, 69223V (2008) https://doi.org/10.1117/12.778463

KEYWORDS: Calibration, Manufacturing, Scanners, Metrology, Silicon, Atomic force microscopy, Line scan image sensors, Error analysis, Surface roughness, Standards development

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Proceedings Article | 5 April 2007 Paper

Leveraging LER to minimize linewidth measurement uncertainty in a calibration exercise

James Robert, Bill Banke, Ronald Dixson

Proceedings Volume 6518, 65184T (2007) https://doi.org/10.1117/12.713101

KEYWORDS: Calibration, Line width roughness, Metrology, Line edge roughness, Standards development, Semiconductors, Atomic force microscopy, Crystals, Error analysis, Line scan image sensors

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