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Jason Reece
at Micron Technology Inc
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Publications (2)
Proceedings Article | 27 April 2023 Poster + Presentation + Paper
OPO robustness and measurability improvement via extended wavelengths
Shlomit Katz, Nikhil Aditya Kumar Roy, Steve McCandless, Jason Reece, Nathan Gillespie, Nils Monserud, Yoav Grauer, Mark Stakely, Greg Gray, Yonglei Li, Peter Kimani, Nahee Park, Iwata Yasuhisa, Imura Koichi, Ito Kosuke, Yuqian Zhang
Proceedings Volume 12496, 1249613 (2023) https://doi.org/10.1117/12.2655161
KEYWORDS: Near infrared, Opacity, Metrology, 3D metrology, Photoresist processing, Overlay metrology, Image processing, Etching, Optical gratings
Proceedings Article | 22 February 2021 Presentation + Paper
Novel diffraction-based overlay metrology utilizing phase-based overlay for improved robustness
Masazumi Matsunobu, Toshiharu Nishiyama, Michio Inoue, Richard Housley, Cornel Bozdog, Justin Lim, Brian Watson, Jason Reece, Steve McCandless, Olger Zwier, Maurits van der Schaar, Murat Bozkurt, Masudur al Arif, Elliott McNamara, Pieter Kapel, Alan Khan, Simon Strom, Paul Turner, Ping Olson, Ewoud van West
Proceedings Volume 11611, 1161126 (2021) https://doi.org/10.1117/12.2584759
KEYWORDS: Overlay metrology, Diffraction, Diffraction gratings, Semiconducting wafers
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