Ms. Ji-Hyun Jeon Profile

Ji-Hyun Jeon

at Hanyang Univ

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Publications (2)

Proceedings Article | 21 November 2023 Poster + Paper

Comparing the mechanical stability of the pellicle under mask stage acceleration with different defect conditions

Ji-Hyun Jeon, Ji-Won Kang, Hye-Keun Oh

Proceedings Volume 12750, 1275013 (2023) https://doi.org/10.1117/12.2687920

KEYWORDS: Pellicles, Scanners, Extreme ultraviolet, Particles, Finite element methods, Extreme ultraviolet lithography, Yield improvement, Transmittance, Thermal stability, Thermal deformation

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Proceedings Article | 28 April 2023 Presentation + Paper

Effect of particle defect to extreme ultra-violet pellicle

Ji-Hyun Jeon, Ji-Won Kang, Hee-Chang Ko, Won-Young Choi, Hye-Keun Oh

Proceedings Volume 12494, 124940G (2023) https://doi.org/10.1117/12.2657898

KEYWORDS: Pellicles, Particles, Extreme ultraviolet, Extreme ultraviolet lithography, Temperature metrology, Semiconducting wafers, Tin, Aluminum, Scanners, Materials properties, High volume manufacturing

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