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Jinkyu Han
at SAMSUNG Electronics Co Ltd
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Publications (2)
Proceedings Article | 1 December 2022 Presentation + Paper
The trade-off between local critical dimension uniformity and sensitivity for contact hole high-NA printing in chemically amplified resists
Chawon Koh, Jinkyu Han, Jinmo Kim, Cheolhong Park, Eunju Kim, Tsunehiro Nishi, Chris Anderson, Patrick Naulleau
Proceedings Volume 12292, 1229203 (2022) https://doi.org/10.1117/12.2641648
KEYWORDS: Scanning electron microscopy, Nanoimprint lithography, Photomasks, Optical lithography, Printing, Extreme ultraviolet, Chemically amplified resists, Stochastic processes, Extreme ultraviolet lithography, Diffusion
Proceedings Article | 10 April 2013 Paper
Advanced overlay stability control with correction per exposure on immersion scanners
Proceedings Volume 8681, 86811D (2013) https://doi.org/10.1117/12.2011379
KEYWORDS: Semiconducting wafers, Overlay metrology, Scanners, Control systems, Process control, Instrument modeling, Lithography, Fourier transforms, Electronics, Semiconductors
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