Unspecified Joren Wouters Profile

Joren Wouters

at Inpria Corp

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Publications (2)

Proceedings Article | 10 April 2024 Presentation + Paper

EUV metal oxide resists: impact of the environment composition on CD during post-exposure delay

Sonia Castellanos, Peter De Schepper, Maireyee Bhattacharya, Jan Doise, Joren Wouters, Amrit Narasimhan, Brian Cardineau, Lauren McQuade, Craig Needham, Michael Kocsis, Kazuki Kasahara, Stephen Meyers

Proceedings Volume 12957, 1295707 (2024) https://doi.org/10.1117/12.3010921

KEYWORDS: Humidity, Extreme ultraviolet lithography, Critical dimension metrology, Printing, Contamination, Semiconducting wafers, Metal oxides, Image processing, Environmental sensing, Chemical analysis

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Proceedings Article | 23 March 2020 Presentation + Paper

Calibration of a MOx-specific EUV photoresist lithography model

Craig Needham, Amrit Narasimhan, Ulrich Welling, Lawrence Melvin, Peter De Schepper, Joren Wouters, Joren Severi, Danilo De Simone, Stephen Meyers

Proceedings Volume 11323, 113230G (2020) https://doi.org/10.1117/12.2552151

KEYWORDS: Data modeling, Calibration, Lithography, Monte Carlo methods, Stochastic processes, Extreme ultraviolet lithography, Photoresist processing, Line width roughness, Systems modeling, Photoresist materials

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