Dr. Jukka Kyynäräinen Profile

Dr. Jukka Kyynäräinen

at VTT Technical Research Ctr of Finland Ltd

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Publications (2)

Proceedings Article | 3 October 2022 Poster + Paper

Resonant micromirror with symmetrical AIN thin film actuators

Konsta Ruotsalainen, Dmitry Morits, Oili M. Ylivaara, Jukka Kyynäräinen

Proceedings Volume 12218, 122180B (2022) https://doi.org/10.1117/12.2633350

KEYWORDS: Mirrors, Micromirrors, Aluminum nitride, Thin films, Electronics, Silicon, Microelectromechanical systems, Chemical elements, Piezoelectric driven mechanisms, Piezoelectric thin film actuators, Piezoelectric effects, Beam steering

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SPIE Journal Paper | 16 February 2022 Open Access

Resonating AlN-thin film MEMS mirror with digital control

Konsta Ruotsalainen, Dmitry Morits, Oili M. Ylivaara, Jukka Kyynäräinen

JOM, Vol. 2, Issue 01, 011006, (February 2022) https://doi.org/10.1117/12.10.1117/1.JOM.2.1.011006

KEYWORDS: Mirrors, Microelectromechanical systems, Micromirrors, LIDAR, Actuators, Semiconducting wafers, Aluminum nitride, Resonators, Optical microsystems, Chemical elements

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