Dr. Kenichi Hibino Profile

Dr. Kenichi Hibino

Information Resources Office at National Institute of Advanced Industrial Science and Technology

SPIE Involvement:

Author

Publications (28)

SPIE Journal Paper | 4 January 2021 Open Access

Synthetic aperture phase-shifting interferometry for high-numerical-aperture spherical surface measurement

Toshiki Kumagai, Yasunari Nagaike, Kenichi Hibino, Katsumi Wasaki

OE, Vol. 60, Issue 01, 014101, (January 2021) https://doi.org/10.1117/12.10.1117/1.OE.60.1.014101

KEYWORDS: Phase shift keying, Spherical lenses, Phase shifts, Phase measurement, Phase interferometry, Phase modulation, Ferroelectric materials, Optical engineering, Fizeau interferometers, Signal to noise ratio

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Proceedings Article | 26 April 2019 Paper

Interferometric precision measurement of highly reflective thin film using wavelength tuning Fizeau interferometry

Yangjin Kim, Kenichi Hibino, Mamoru Mitsuishi

Proceedings Volume 11032, 1103213 (2019) https://doi.org/10.1117/12.2521857

KEYWORDS: Thin films, Interferometry, Reflectivity, Phase shifting, Silica, Phase interferometry, Beam splitters, Phase shifts, Wavelength tuning, Fringe analysis

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Proceedings Article | 14 September 2018 Presentation + Paper

Three surface method of stylus error compensation for aspherical lens measurement in a 3D contact profilometry

Yasunari Nagaike, Toshiki Kumagai, Kenichi Hibino

Proceedings Volume 10742, 107420W (2018) https://doi.org/10.1117/12.2319572

KEYWORDS: Aspheric lenses, Monochromatic aberrations, 3D metrology, Error analysis, Calibration, Spherical lenses, Optical testing, Optical spheres, Mirrors, Interferometers

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Proceedings Article | 18 August 2018 Paper

Synthetic aperture phase-shifting interferometry for high numerical-aperture spherical surface measurement

Toshiki Kumagai, Yasunari Nagaike, Kenichi Hibino

Proceedings Volume 10749, 1074915 (2018) https://doi.org/10.1117/12.2319643

KEYWORDS: Phase shift keying, Spherical lenses, Phase shifts, Phase measurement, Phase modulation, Fizeau interferometers, Ferroelectric materials, Phase interferometry, Glasses

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SPIE Journal Paper | 2 March 2017 Open Access

Dual-phase-shift spherical Fizeau interferometer for reduction of noise due to internally scattered light

Toshiki Kumagai, Kenichi Hibino, Yasunari Nagaike

OE, Vol. 56, Issue 03, 034102, (March 2017) https://doi.org/10.1117/12.10.1117/1.OE.56.3.034102

KEYWORDS: Phase measurement, Light scattering, Spherical lenses, Fizeau interferometers, Phase shifts, Reflection, Monochromatic aberrations, Double positive medium, Sensors, Collimators

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Proceedings Article | 28 August 2016 Presentation + Paper

Dual-phase-shift schemes for internal-reflection noise reduction in a Fizeau interferometer

Toshiki Kumagai, Kenichi Hibino, Yasunari Nagaike

Proceedings Volume 9960, 99600C (2016) https://doi.org/10.1117/12.2237494

KEYWORDS: Phase measurement, Fizeau interferometers, Phase shifts, Denoising, Spherical lenses, Reflection, Collimators, Monochromatic aberrations, Confocal microscopy, Beam splitters

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Proceedings Article | 18 August 2014 Paper

Design of new window function of phase extraction algorithm in wavelength tuning Fizeau interferometer

Yangjin Kim, Kenichi Hibino, Naohiko Sugita, Mamoru Mitsuishi

Proceedings Volume 9203, 92030Q (2014) https://doi.org/10.1117/12.2061476

KEYWORDS: Phase shifts, Algorithm development, Detection and tracking algorithms, Semiconductors, Reflectivity, Fourier transforms, Wavelength tuning, Fizeau interferometers, Photomasks, Lithography

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Proceedings Article | 1 May 2014 Paper

Measurement of the surface shape and optical thickness variation of a polishing crystal wafer by wavelength tuning interferometer

Yangjin Kim, Kenichi Hibino, Ryohei Hanayama, Naohiko Sugita, Mamoru Mitsuishi

Proceedings Volume 9132, 91320V (2014) https://doi.org/10.1117/12.2051193

KEYWORDS: Wafer-level optics, Semiconducting wafers, Surface finishing, Crystals, Polishing, Wavelength tuning, Phase shifts, Lithium niobate, Fizeau interferometers, Detection and tracking algorithms

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Proceedings Article | 2 April 2014 Paper

Design of the phase-shifting algorithm for flatness measurement of a mask blank glass

Yangjin Kim, Kenichi Hibino, Naohiko Sugita, Mamoru Mitsuishi

Proceedings Volume 9050, 90501W (2014) https://doi.org/10.1117/12.2045319

KEYWORDS: Phase shifts, Algorithm development, Photomasks, Glasses, Americium, Semiconductors, Quadrature amplitude modulation, Phase interferometry, Precision measurement, Extreme ultraviolet

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Proceedings Article | 13 May 2013 Paper

Excess fraction measurement of a transparent glass thickness in wavelength tuning interferometry

Yangjin Kim, Kenichi Hibino, Kanako Harada, Naohiko Sugita, Mamoru Mitsuishi

Proceedings Volume 8788, 878803 (2013) https://doi.org/10.1117/12.2020327

KEYWORDS: Refractive index, Interferometry, Glasses, Photomasks, Wavelength tuning, Phase shifts, Optical testing, Beam splitters, Fizeau interferometers, Semiconductors

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Proceedings Article | 13 September 2012 Paper

Error estimation of phase detection algorithms and comparison of window functions

Ryohei Hanayama, Kenichi Hibino

Proceedings Volume 8493, 84930J (2012) https://doi.org/10.1117/12.929785

KEYWORDS: Detection and tracking algorithms, Error analysis, Signal detection, Phase shifts, Phase shift keying, Phase shifting, Computer simulations, Algorithm development, Photovoltaics, Interference (communication)

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Proceedings Article | 3 November 2011 Paper

Measurement of absolute optical thickness by wavelength tuning interferometer

Kenichi Hibino, Yangjin Kim, Youichi Bitou, Mamoru Mitsuishi

Proceedings Volume 8011, 80110B (2011) https://doi.org/10.1117/12.901637

KEYWORDS: Refractive index, Optical testing, Wavelength tuning, Phase measurement, Interferometers, Interferometry, Silica, Glasses, Beam splitters, Wafer-level optics

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Proceedings Article | 27 May 2011 Paper

Development of error estimation method for phase detection in phase shift method

Ryohei Hanayama, Kenichi Hibino

Proceedings Volume 8082, 80822N (2011) https://doi.org/10.1117/12.889814

KEYWORDS: Detection and tracking algorithms, Error analysis, Signal detection, Phase shifts, Phase shift keying, Phase shifting, Computer simulations, Modulation, Algorithm development, Photovoltaics

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Proceedings Article | 11 August 2008 Paper

Measurement of absolute optical thickness distribution of a mask-glass by wavelength tuning interferometry

Kenichi Hibino, Kim Yangjin, Youichi Bitou, Sonko Ohsawa, Naohiko Sugita, Mamoru Mitsuishi

Proceedings Volume 7063, 70630S (2008) https://doi.org/10.1117/12.797594

KEYWORDS: Refractive index, Interferometry, Optical testing, Phase measurement, Glasses, Wavelength tuning, Fizeau interferometers, Interferometers, Beam splitters, Ferroelectric materials

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Proceedings Article | 14 August 2006 Paper

Absolute interferometry for surface shapes with large steps by wavelength tuning with a mechanical phase shift

Kenichi Hibino, Yosuke Tani, Toshiyuki Takatsuji, Youichi Bitou, Shinichi Warisawa, Mamoru Mitsuishi

Proceedings Volume 6292, 62920Q (2006) https://doi.org/10.1117/12.679314

KEYWORDS: Interferometry, Ferroelectric materials, Phase shifts, Wavelength tuning, Phase measurement, Phase interferometry, Fizeau interferometers, Beam splitters, Profiling, Silica

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Proceedings Article | 9 December 2005 Paper

Measurement of optical thickness variation of a multiple-surface object by a wavelength tuning interferometer

Jan Burke, Kenichi Hibino, Ryohei Hanayama, Bonzenko Oreb

Proceedings Volume 6024, 60240O (2005) https://doi.org/10.1117/12.666830

KEYWORDS: Semiconducting wafers, Wafer-level optics, Wavelength tuning, Optical testing, Interferometers, Reflection, Interferometry, Lithium niobate, Glasses, Silica

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Proceedings Article | 2 August 2004 Paper

Interferometric measurement of a multiparallel-surface transparent object by a new class of wavelength tuning algorithms

Kenichi Hibino, Jan Burke, Ryohei Hanayama, Bozenko Oreb

Proceedings Volume 5531, (2004) https://doi.org/10.1117/12.555804

KEYWORDS: Signal detection, Interferometry, Phase shifts, Glasses, Modulation, Refractive index, Phase measurement, Algorithm development, Detection and tracking algorithms, Interference (communication)

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Proceedings Article | 22 December 2003 Paper

Measurement of surface figure and optical thickness variation of a thin parallel plate in wavelength-scanned interferometry with minimized laser tuning range

Kenichi Hibino, Jan Burke, Bozenko Oreb

Proceedings Volume 5180, (2003) https://doi.org/10.1117/12.503439

KEYWORDS: Phase shifts, Refractive index, Wavelength tuning, Signal detection, Photovoltaics, Fizeau interferometers, Interferometers, Interferometry, Detection and tracking algorithms, Algorithm development

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Proceedings Article | 19 November 2003 Paper

Refractive index inhomogeneity measurement of a parallel plate in a Fizeau interferometer by a new wavelength scanning algorithm

Kenichi Hibino, Bozenko Oreb, Philip Fairman

Proceedings Volume 4829, (2003) https://doi.org/10.1117/12.530070

KEYWORDS: Refractive index, Fizeau interferometers, Interferometry, Optical testing, Interferometers, Absorbance, Phase measurement, Glasses, Sapphire, Surface finishing

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Proceedings Article | 20 June 2002 Paper

Improved algorithms for wavelength scanning interferometry: application to the simultaneous measurement of surface topography and optical thickness variation in a transparent parallel plate

Kenichi Hibino, Bozenko Oreb, Philip Fairman

Proceedings Volume 4777, (2002) https://doi.org/10.1117/12.472221

KEYWORDS: Interferometry, Dispersion, Signal detection, Modulation, Fizeau interferometers, Interferometers, Detection and tracking algorithms, Optical testing, Refractive index, Reflection

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Proceedings Article | 30 October 2001 Paper

Wavefront sensing of a rear-surface reflection through a transparent media suppressing multiple-beam interference effect

Kenichi Hibino, Toshiyuki Takatsuji, Sonko Osawa, Tomizo Kurosawa

Proceedings Volume 4596, (2001) https://doi.org/10.1117/12.447367

KEYWORDS: Reflection, Glasses, Profiling, Refractive index, Interference (communication), Interferometers, Phase measurement, Modulation, Phase shifts, Fizeau interferometers

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Proceedings Article | 22 October 2001 Paper

Japanese ultimate flatness interferometer (FUJI) and its preliminary experiment

Toshiyuki Takatsuji, Nobuaki Ueki, Kenichi Hibino, Sonko Osawa, Tomizo Kurosawa

Proceedings Volume 4401, (2001) https://doi.org/10.1117/12.445643

KEYWORDS: Interferometers, Collimators, CCD cameras, Silica, Ferroelectric materials, Nanoimprint lithography, Wave plates, Zerodur, Silicon, Semiconducting wafers

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Proceedings Article | 13 August 1999 Paper

Fringe analysis in phase-shifting interferometers suppressing spatially nonuniform phase modulation, beam amplitude modulation, and nonlinearity of modulator

Kenichi Hibino

Proceedings Volume 3744, (1999) https://doi.org/10.1117/12.357721

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Proceedings Article | 19 August 1998 Paper

Suppression of spatial nonuniformity and nonlinearity in phase modulation in phase-shifting interferometry

Kenichi Hibino

Proceedings Volume 3573, (1998) https://doi.org/10.1117/12.324570

KEYWORDS: Phase shifts, Phase shift keying, Phase modulation, Ferroelectric materials, Phase interferometry, Interferometers, Spherical lenses, Mirrors, Phase shifting, Modulators

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Proceedings Article | 30 June 1998 Paper

Phase determination algorithms compensating for spatially nonuniform phase modulation in phase-shifting interferometry

Kenichi Hibino, Makoto Yamauchi

Proceedings Volume 3478, (1998) https://doi.org/10.1117/12.312928

KEYWORDS: Phase shifts, Phase shift keying, Phase modulation, Phase measurement, Interferometers, Phase interferometry, Photovoltaics, Modulators, Ferroelectric materials, Phase shifting

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Proceedings Article | 24 September 1997 Paper

Susceptibility of error-compensating algorithms to random noise and nonlinear phase modulations in phase-shifting interferometry

Kenichi Hibino

Proceedings Volume 3161, (1997) https://doi.org/10.1117/12.279475

KEYWORDS: Phase shifts, Error analysis, Fizeau interferometers, Phase interferometry, Algorithm development, Nonlinear optics, Phase modulation, Phase shifting, Reflectivity, Solids

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