Mr. Kiichi Ishikawa Profile

Kiichi Ishikawa

at Sony Corp

SPIE Involvement:

Author

Publications (8)

Proceedings Article | 11 May 2007 Paper

Alternating phase-shift mask and binary mask for 45-nm node and beyond: the impact on the mask error control

Yosuke Kojima, Masanori Shirasaki, Kazuaki Chiba, Tsuyoshi Tanaka, Yukio Inazuki, Hiroki Yoshikawa, Satoshi Okazaki, Kazuya Iwase, Kiichi Ishikawa, Ken Ozawa

Proceedings Volume 6607, 66070C (2007) https://doi.org/10.1117/12.728925

KEYWORDS: Photomasks, Chromium, Semiconducting wafers, Printing, Etching, Binary data, Resolution enhancement technologies, Reflectivity, Scanning electron microscopy, Image enhancement

Read Abstract +

Proceedings Article | 5 November 2005 Paper

A novel strategy of lithography-error-budget optimization for the 65-nm node: mask specifications for hyper-NA imaging

Kazuya Iwase, Kiichi Ishikawa, Koichi Takeuchi, Ken Ozawa, Fumikatsu Uesawa

Proceedings Volume 5992, 59920Y (2005) https://doi.org/10.1117/12.632021

KEYWORDS: Photomasks, Tolerancing, Immersion lithography, Error analysis, Lithography, Electroluminescence, Lithographic illumination, Critical dimension metrology, Scanners, Refractive index

Read Abstract +

Proceedings Article | 6 December 2004 Paper

Phase defect printability and mask inspection capability of 65-nm technology node Alt-PSM for ArF lithography (Photomask Japan Best Paper)

Shinji Akima, Tooru Komizo, Saburo Kawakita, Yutaka Kodera, Tsuyoshi Narita, Kiichi Ishikawa

Proceedings Volume 5567, (2004) https://doi.org/10.1117/12.580003

KEYWORDS: Photomasks, Semiconducting wafers, Inspection, Defect detection, Visibility, Lithography, Scanning electron microscopy, Atomic force microscopy, Phase shift keying, Image enhancement

Read Abstract +

Proceedings Article | 28 August 2003 Paper

Phase defect printability of alternating phase shift masks for ArF lithography

Nobuyuki Ohba, Kiichi Ishikawa, Mikio Katsumata, Hidetoshi Ohnuma

Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504285

KEYWORDS: Photomasks, Semiconducting wafers, Inspection, Phase shifts, Printing, Lithography, 3D modeling, Optical lithography, Manufacturing, Data modeling

Read Abstract +

Proceedings Article | 30 December 1999 Paper

Fabrication process of Cr-based attenuated phase-shift masks for KrF excimer laser lithography

Ichiro Kagami, Kiichi Ishikawa, Daichi Kakuta, Hiroichi Kawahira

Proceedings Volume 3873, (1999) https://doi.org/10.1117/12.373387

KEYWORDS: Carbon, Photomasks, Etching, Transmittance, Quartz, Phase shifts, Lithography, Opacity, Excimer lasers, Photoresist processing

Read Abstract +

Proceedings Article | 25 August 1999 Paper

Development of Cr-based attenuated phase-shift mask process for 0.18-um device generation

Ichiro Kagami, Kiichi Ishikawa, Daichi Kakuta, Hiroichi Kawahira

Proceedings Volume 3748, (1999) https://doi.org/10.1117/12.360215

KEYWORDS: Photomasks, Etching, Quartz, Critical dimension metrology, Phase shifts, Semiconducting wafers, Dry etching, Lithography, Excimer lasers, Photoresist processing

Read Abstract +

Proceedings Article | 8 December 1995 Paper

Defect printability study of attenuated phase-shifting masks for specifying inspection sensitivity

Minoru Sugawara, Kiichi Ishikawa, Hiroichi Kawahira, Ichiro Kagami, Satoru Nozawa

Proceedings Volume 2621, (1995) https://doi.org/10.1117/12.228199

KEYWORDS: Photomasks, Semiconducting wafers, Transmittance, Phase shifts, Inspection, Defect inspection, Optical proximity correction, Mask making, Indium arsenide, Optical calibration

Read Abstract +

Proceedings Article | 8 December 1995 Paper

Attenuated phase-shifting mask specification with modified beam illumination

Ichiro Kagami, Minoru Sugawara, Hiroichi Kawahira, Keisuke Tsudaka, Kiichi Ishikawa, Satoru Nozawa

Proceedings Volume 2621, (1995) https://doi.org/10.1117/12.228198

KEYWORDS: Photomasks, Transmittance, Lithography, Photoresist processing, Lithographic illumination, Phase shifts, Convolution, Semiconducting wafers, Optical lithography, Mask making

Read Abstract +

Showing 5 of 8 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years