The method of high-density data recording by laser thermo-lithography with ion-beam etching was proposed. The
nanocomposite films were created by the spin-coating method on basis of organic positive photoresist and added
synthesized dyes characterized by absorption in the spectral region 390-410 nm and which are able to be evaporated by
405 nm laser radiation. The pits with 250 – 300 nm width were performed on the thin organic nanocomposite films by
405 nm laser beam focused by 0.85 NA lens. The organic nanocomposite film with obtained pits was used as a mask for
reactive ion-beam etching of glass substrate. The 150 nm pits were performed on the substrate surface in the result of the
laser thermo-lithography with ion-beam etching.
K. Grytsenko, T. Doroshenko, Yu. Kolomzarov, V. Prokopets, O. Fedoriak, R. Zelinski, O. Lytvyn, D. Prescher, B. Grimm, V. Ksianzou, S. Schrader, O. Tolmachev, Yu. Slominskii, V. Kurdiukov, G. Smirnova
Organic film deposition in vacuum is fast developing scientific and industrial domain. We developed installation for
deposition of organic films equipped with optical spectrometer for measurements in situ. We are developing new dyes
aimed for application in waveguide sensor, nonlinear optics and studying film organisation during deposition.
Fluorinated azo-dyes and azomethine dyes were synthesized at University of Applied Sciences Wildau and at the
Institute of Organic Chemistry, Kyiv. Compounds were evaporated at a pressure of 10-3 Pa using resistive heated
crucible. Glass and glass covered with polytetrafluoroethylene (PTFE) film are used as substrates. The films were
studied with Polytec and StellarNet spectrometers and an atomic force microscope. Optical spectra of the dye films
revealed, that some compounds were decomposed during evaporation. Several kinds of dyes were evaporated and
deposited without decomposition. Some deposited films formed H-aggregates and other types of aggregates. AFM
images of dye films showed that their morphology depends on the chemical structure of the compounds and on the nature
of the substrate on which the film was grown.
Second harmonic generation (SHG) in the oriented film of symmetric squaraine (Sq) was studied. Oriented Sq film on
aligned polytetrafluoroethylyne (PTFE) sublayer prepared by vacuum deposition with subsequent rubbing using a cloth
has been obtained. However, the mechanisms of orientation and SHG are still not clear. Methyl and ethyl substituted
hydroxyl-Sq (OHSq) compounds formed oriented films with dichroic ratio of 8 on PTFE layer but with dichroic ratio of
1,5 on Teflon AF. Second layer deposition of Me-OHSq on Et-OHSq or of Et-OHSq on Me-OHSq led to an increase of
the film dichroic ratio. Only the film, where Me-OHSq was first layer, exhibits an increase of SHG signal after
deposition of second layer. Small differences in bi-layered OHSq films structure was detected by X-Ray diffraction
(XRD) spectra.
Thin metal-filled polymer films produced by low temperature plasma are used as resistors, protective coatings, catalyzers. Among the others they are used for optical recording media. The possibility to use MOC PECVD for optical recording media production using the Te-based precursors was shown. Sb-based metal-polymer films also attract attention before because Sb is less toxic and more stable, than Te. In this work authors used plasma polymerization with simultaneous Sb evaporation forma boat. In the researches known before the precursor dissociation during PECVD is carried out mainly by low frequency, radio frequency and microwave discharges. Each of these discharges have peculiarities which result on film properties. But all these discharges effect on both dissociation and polymerization processes, which leads to difficulties to obtain films with predetermined properties. It was known before, that the pulsed discharge use for polymerization of organic monomers allows to rule of the ratio between dissociation and polymerization processes, what effects strongly films properties.
Deposition rate during laser evaporation is about 3-5 times higher than during thermal evaporation. Evaporated malonitrile-based merocyanine (Mc) and phtalocyanine (Pc) dyes from smooth films with high optical absorption and reflection in visible and near-IR regions. PcVO film, deposited at 20 degrees C consists of high temperature crystal phase. Co-deposition of polymer and dye showed that the films consists of the polymer matrix filled by dye nanoparticles. Polystyrene and polychlorotrifluoroethylene were used. It was known before, that low temperature plasma treatment of some dye vapors led to their polymerization and stability enhancement, but specific optical properties were reduced strongly. We tried to adjust dye chemical structure and plasma parameters. Films enhance their adhesion and stability significantly, retaining high optical absorption. Their spectra have some peculiarities, but main peaks are the same as for the parent dye.
Throughout the paper, the concept of the planar 1D lay-out of kxk-switches and the concept of its compact double- layer/multi-layer counterpart will be presented and experimental results analyzed for k equals 4. The paper presents the construction and treats of the working principles of switching system that can operate with minimum number of stages. A reduction of the number of stages is obtained due to combination of the electro-optic (EO) polymer films on the isotropic substrate. The optical switches are collected in one optical layer and each layer composes of at most two 2 by 2 switches simultaneously active. Poly film doped with azo dye and para-nitro- aniline/polyvinyl alcohol were used for the EO films preparation. Thereby switching is applied horizontally and vertically. The scheme of such a 4 by 4 switch in double- layer technique has been presented.
The methods of organic thin film deposition with determined optical properties include several interrelated steps: the precursor synthesis, which chemical structure takes into account deposition conditions; deposition conditions, which takes into account both precursor properties and film properties needed; additional film treatment. By this approach use, the polymers, dyes, metal- and dye-filled polymers were produced by vacuum and laser evaporation, plasma polymerization, combined methods. Films were studied by VIS, IR, Raman spectroscopy, electron microscopy etc. Many organic compounds with complicated chemical structure can be deposited in vacuum and plasma. These films posses unique properties of precursors. The studies of polymer, dye and metal-filled films for write once read many optical media reveal their good characteristics.
Evaporated squarilium-based, malonitrile-based merocyanine, metal-complexes on dithiolate base, ketocyanine and phtalocyanine (Pc) dyes form smooth films, which show high optical absorption and reflection in visible and near- infrared regions. Co-deposition of polytetrafluoroethylene (PTFE) and Pc dyes showed that the films obtained consist of the PTFE matrix filled by Pc particles of 10 - 30 nm size. Recording on dye film is performed in ablative mode by 9 mW of semiconductor laser, if PTFE sublayer is used. Three types of hole opening mechanisms were obtained by choosing dye and substrate with properties needed.
Polymer films filled with metal nanoparticles were produced both by vacuum co-deposition and plasma enhanced chemical vapor deposition. Films composition and structure were studied by AES, TEM, SEM, Raman scattering and ellipsometry. Information was recorded by both Nd:YAG laser at 532 nm and semiconductor laser at 830 nm. Te, Sb, Sn, Pd, Au-contained films of different composition were produced. Hydrocarbon and fluorocarbon polymers were used. It is shown, that the recording energy is determined by physical properties of metal, its concentration and phase morphology. The polymer matrix properties strongly influence threshold characteristic of media. There are three possible recording mechanisms on the metal-polymer media: ablation, swelling, bubbling. They depend on melting and evaporation temperatures of the metal and decomposition temperature of the polymer. The swelling type media shows the best resolution and high stability, if noble metal is used. For this type media polymer must have a slope of function of viscosity and quantity of decomposition products vs temperature as sharp as possible, while for ablation type media these properties should align with melting and evaporation temperatures of metal.
KEYWORDS: Palladium, Particles, Plasma enhanced chemical vapor deposition, Plasma, Metals, Polymers, Received signal strength, Optical recording, Chemical species, Oxidation
Plasma enhanced chemical vapor deposition is a novel process to produce metal-filled polymer films. Both bis-allyl-Pd-Cl and allyl-Pd-pentacyclodienyl precursors were used. In conditions dependent on precursor, pressure, electrical power, voltage, frequency and substrate temperature films of different chemical structure and morphology were obtained. Transparent films and absorptive amorphous ones were deposited. Film structure could be both mixture of particles and Pd particles surrounded by organic matrix. The complicated structure of organic part of Pd-based films can be explained by some chemical syntheses taking place during plasma process. The film sensitivity to laser irradiation and writing threshold dependent not only on Pd content but also on phases distribution morphology. Film sensitivity correlates with its electrical resistivity. Thermal stability correlates with cross-links quantity. Pd particles were not oxidized under 450 degrees C annealing.
The properties of metal-polymeric recording media obtained by the decomposition of alkyl tin (Sn) and antimony (Sb) compounds in low-temperature plasma have been investigated. We have experimentally determined the changes of pit shapes during the photothermal recording and the basic medium characteristics when changing the metal and carbon concentrations in the films.
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