Physical deposition by evaporation is a convenient and cost effective method for generating thin layers of material. In this work, we utilise an electron-beam evaporation system retrofitted with a rotating shutter to control and reduce the deposition rate of materials. Under normal conditions, the evaporator is able to achieve a typical deposition rate of 1 A/s. In order to reduce the deposition rate, a rotating shutter was designed and retrofitted to the evaporator. The rotating shutter consists of a metal plate with a slit opening of 6° and 36°. When rotated during evaporation, a reduction in deposition rate of 1/60 and 1/10 onto a sample is expected. We can control the deposition to achieve a rate of 1 A/min. By using this modified system, we deposited Si and SiO2 onto Si substrates. In situ deposition is monitored using a quartz thickness monitor. After evaporation, film thickness is measured using AFM and verified with spectroscopic ellipsometer measurement. Using this method, we are able to reach a deposited film thickness of 3 nm. This work is expected to contribute significantly towards the fabrication of low dimensional silicon devices.
Recent advances in the production of high-purity synthetic diamonds have made diamond an accessible host material for
applications in present and future optoelectronic and photonic devices. We have developed a scalable process for
fabricating photonic devices in diamond using reactive ion etching (RIE) and photolithography as well as using ion
implantation to provide vertical confinement. Applying this we have demonstrated a few-moded waveguide with a large
cross section for easier coupling to optical fibre. We present our work towards in-plane coupling to diamond waveguides
and consequently characterisation of these waveguides. We also examine the application of diamond waveguides to other
photonic applications for achieving light confinement in a subwavelength cavity site using a slot-waveguide design. Such
cavities may be used to enhance photon-emission properties of a built-in diamond colour centre and to achieve strong
light-matter interactions on the single-quantum level necessary for quantum information technology. Using single
cavities as building block, we also show that these structures can be suitably coupled to form one-dimensional coupled-resonator
array.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.