Dr. Lei Feng Profile

Dr. Lei Feng

at Infinitesima Ltd

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Publications (3)

Proceedings Article | 12 November 2024 Presentation + Paper

Enhancing lithography precision: characterizing resist profiles in semiconductor manufacturing with rapid probe microscopy

L. Feng, V. Panchal, R. Thorogate, J. Robinson, J. Cossins, A. D. Humphris, V. Vaenkatesan, J. Finders

Proceedings Volume 13215, 132150A (2024) https://doi.org/10.1117/12.3034551

KEYWORDS: Critical dimension metrology, Lithography, Matrices, Finite element methods, Coating thickness, Atomic force microscopy, 3D metrology, Semiconductor manufacturing, Microscopy, Metrology

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Proceedings Article | 20 March 2020 Paper

The application of a Rapid Probe Microscope (RPM) for investigating 1D and 2D structures from EUV lithography

Andrew D. Humphris, Alain Moussa, Mircea Dusa, Anne-Laure Charley, Elis Newham, Jenny Goulden, Lei Feng, Christopher Bevis

Proceedings Volume 11325, 113251M (2020) https://doi.org/10.1117/12.2552054

KEYWORDS: 3D image processing, Extreme ultraviolet lithography, Microscopes, 3D metrology, Extreme ultraviolet, Data analysis, Metrology, Statistical analysis, Finite element methods, Microscopy

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Proceedings Article | 20 March 2020 Paper

A novel high throughput probe microscope: for measuring 3D structures, designed for in-line, integrated or standalone operation

A.D. Humphris, L. Feng, M. Tedaldi, L. Mudarikwa, D. Ockwell, J. Goulden

Proceedings Volume 11325, 113252H (2020) https://doi.org/10.1117/12.2551693

KEYWORDS: Microscopes, Image quality, Photomasks, Metrology, 3D metrology, Manufacturing, Semiconducting wafers, Line edge roughness, Chemical mechanical planarization, Structural design

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