Ms. Lei Liu Profile

Lei Liu

at Shanghai Institute of Optics and Fine Mechanics

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 23 August 2013 Paper

Design and simulation of double annular illumination mode for microlithography

Qiang Song, Jing Zhu, Baoxi Yang, Lei Liu, Jun Wang, Huijie Huang

Proceedings Volume 8911, 891105 (2013) https://doi.org/10.1117/12.2031650

KEYWORDS: Lithographic illumination, Double patterning technology, Lithography, Axicons, Polarization, Resolution enhancement technologies, Photomasks, Wave plates, Critical dimension metrology, Micro optics

Read Abstract +

Proceedings Article | 21 August 2013 Paper

Polarization phase shifting lateral shearing interferometer

Lei Liu, Aijun Zeng, Linglin Zhu, Qiang Song, Huijie Huang

Proceedings Volume 8906, 89060Z (2013) https://doi.org/10.1117/12.2033009

KEYWORDS: Phase shifting, Polarization, Beam splitters, Shearing interferometers, Phase shifts, Interferometers, Optical testing, Phase interferometry, Interferometry, Wavefronts

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years