In modern intelligent living, X-ray computed tomography (CT) exhibit the great potential in industry for non-destructive dimensional quality control purposes, which serving a range of monitoring and management, from chips, integrated circuits, batteries, and automotive components. In this paper, a special standard sample was designed and manufactured to test critical dimensional characteristics on different CT systems. Additionally, a sequential participation scheme, together with detailed measurement procedures and reporting instructions, has been proposed to evaluate measurement uncertainty and determine metrological performances of CT systems. Finally, a series of experimental tests were carried out to demonstrate dimensional measurement errors of CT systems. Those results have been proven to be amenable for practical purposes through many tests so that it might be applicable to achieve accuracy and traceability issues of CT systems in industrial intelligent production line.
In this paper, a full geometric information measuring model of 3D gear was developed based on laser scanning techniques. In order to generate a optimum sampling path, a measuring cost function was proposed by considered of the relationship among the sampling interval, sampling point clouds, and measurement precision of key features. On the other hand, 3D tooth surface measurement error was described by quantitative point cloud data. A commercial 3D gear measuring system was also introduced, which has a degrees of laser scanner and self-developed special analysis software. Finally, a series of experiments on typical cylindrical gears (base circle diameter from 100 mm to 500 mm) were performed to demonstrate this automated path planning technique, measurement cost, and the full geometric measurement accuracy.
In order to obtain the inherent law of the structure and performance of the SMA actuator of the bionic flexible dexterous hand. Four phase transition temperature parameters of SMA wire were obtained by temperature test. The Brinson constitutive model was used to describe the material relationship of SMA. The finite element model of SMA mechanical properties was established by user material subroutine (UMAT). The validity of the secondary development was verified by comparing the results with the literature. Based on this, the parametric finite element modeling and simulation of SMA actuator were carried out, and the influencing factors of mechanical properties of SMA actuator were analyzed. The results show that the SMA wire diameter of the dexterous hand actuator has a great influence on the performance of the actuator, while the structural parameters such as the winding spacing and the actuator diameter have little effect on the driving performance of the SMA wire. The pre-stretching force and output force of the actuator increase with the increase of the diameter of the SMA wire. The research results provide a reference for the design of related SMA actuators.
In modern manufacturing, the in-process measurement of complex surface of cylindrical gear is critical and challenging, and is directly associated with subsequent assembly and terminal gear quality. 3D geometric measurements of gear are ones of the crucial fundamental quantities to ensure their conformity to design specifications serving a range of industries, from shipping, automotive and aerospace industries to house applications. In this paper, an automated sampling path planning model is designed in order to obtain a loss cost sampling path by consider of the complex surface of cylinder gear. The high-precision full information model of tooth flank is also being established, which depends on the measurement procedure and the measurement uncertainty. A series of experiment on several typical cylindrical gears were carried out to demonstrate this automated path planning technique and the final geometric measurement accuracy. On the other hand, an commercial 3D geometric measuring system was also introduced, which has two degrees of laser scanner. Those scanning paths generation have been proven to be amenable for practical purposes through many tests so that it might be applicable to achieve 3D geometric measurements of large gear
In this paper, a submicron linewidth measurement method based on computer microscopic imaging technology to improve the measuring precision is proposed. Firstly, the microscopic image of the standard line pair is taken at the magnification M, and the pixel representing distance (PRD) of the microscopic image is calibrated. Secondly, the noise of the image is eliminated by the median filtering technology, and then the minimum ambiguity criterion of direction information measurement is used to quickly identify the edge boundary points of linewidth. Then, the edge points of the linewidth are fitted and filled to form a regular geometry shape, which can be accurately located by using the cascaded Hough transform algorithm. Finally, in order to verify the validity of the method, several representative linewidths are selected on the standard sample plate to repeat the measurement nine times, the experimental results show that for line width greater than 2 μ m, the error of measuring linewidth with the method studied in this paper is less than 0.1 μ m. Therefore, this method reveals the possibility of high-precision measurement of linewidth through microscopic images, and makes it be a much better option to be employed for further micro-nano structures analysis applications.
Laser interferometry is a typical representative of the highest level in the field of geometric metrology, and its accuracy can reach sub-nanometer while taking the light wavelength as a measuring scale. In this paper, we present a precisely controlled transmission structure to realize the conversion between angular and linear displacement, therefore the angular displacement can be obtained based on the high-precision linear displacement measured by the laser interferometric system. By comparing the measured angular values with the reference values, the maximum error of angular displacement measurement in this system is ± 5 arcsec, which is from the calibration certification of the National Institute of Metrology. The reference values are obtained by measuring the angular polygon with a photoelectric autocollimator, and an angular displacement measurement error of ±1 arcsec is achieved based on laser interferometric system in this paper after correcting with a series of conversion coefficients between linear and angular displacement.
In order to obtain high precision optical constants at in the ellipsometry measurement process, an optimization algorithm for solving the complex refractive index of nano films at visible wavelength is proposed. To improve the convergence rate and the ability to escape from local optimum of original algorithm, an Improved Particle Swarm Optimization (IPSO) has been proposed to deal with and analyze the ellipsometry parameters, this method combines the evolutionary algebraic attenuation factor with the adaptive genetic algorithm. The algorithm is used to calculate the film parameters of silicon dioxide nano film thickness standard template with standard value of 100.4±0.3 nm in this paper. The results show that the relative error of the calculation results of the optical constants refractive index error is less than 0.1 at visible wavelength. At the same time, it is verified by experiments that the IPSO algorithm model can effectively optimize the number of iterations and has the advantages of fast convergence speed and high measurement efficiency.
This article adopts comparative measurement means to realize the intelligent measurement of gauge blocks through micro range high-precision inductance sensor based on the principle of inductance micrometer. The gauge block intelligent measurement system mainly includes intelligent detection system and data management system. The experimental results of indication error, measurement repeatability and time drift of the measurement system show that the system can measure gauge blocks with high accuracy and efficiency.
Continuously Operating Reference Station (CORS) is an integrated service system constructed based on multi-base station network Real Time Kinematic (RTK) technology. CORS system is composed of several fixed and continuously operating GNSS reference stations which form a network automatically providing different types of GNSS observations such as carrier phase and pseudorange, various correction numbers, status information and other GNSS services through computers, data communication and Internet (LAN/WAN) technology. This article selects an appropriate location and sets up a reference station to receive Beidou, GPS, GLONASS satellite data basing on CORS system, establishes an All-Terrain inspection field, designs a set of mobile positioning terminals, and develops a set of real time inspection software for the calibration of navigation products. Experimental verification results shows that the calibration system designed by this article is applicable to calibrate navigation products and worthy of extensive promotion.
In order to obtain accurate nano-film characteristic parameters in the ellipsometry measurement process, an optimization algorithm for solving the thickness and complex refractive index of nano films by spectroscopic ellipsometry is proposed. An improved adaptive genetic algorithm (IAGA) has been proposed to process nano-film data, this method combines the evolutionary algebraic attenuation factor with the adaptive genetic algorithm. It can solve the problem that the genetic algorithm is premature and easy to fall into the local optimization. The algorithm is used to calculate the film parameters of silicon dioxide nano film thickness standard template with standard value of 49.7±0.4 nm in this paper. The results show that the relative error of the calculation results of the film thickness is less than 3%, and the error of refractive index is less than 0.1. At the same time, it is verified by experiments that the IAGA algorithm model can effectively optimize the number of iterations, and has the advantages of fast convergence speed and high measurement efficiency.
A method for solving bimetallic film coefficients using surface plasmon resonance (SPR) phase difference experimental data with fixed wavelength and multiple incident angles is presented to simplify and quickly solve the thickness and optical constants of metal films in this paper. The purpose is to extract unknown parameters from the phase difference between P- and S- polarizations of the reflected light occurred at the metal/dielectric interface. The results of bimetallic layer film’s thickness and optical constants obtained by our method are in better agreement with that of spectroscopic ellipsometer (SE) measurement method. Therefore, the approach reveals the possibility of retrieving the thickness and optical constants from the measurement results of the phase difference for multilayers, and makes it be a much better option to be employed for further film’s parameter analysis applications
Scanning electron microscope (SEM) with feature analysis software has been used for micro-scale surface measurement tasks for many years because of the benefits of fast massive acquisition of nano-scale features, non-contact operation, and automatic data processing. Full information of surface usually needs to obtain in some inspection fields, such as vertical engine part monitoring, cleanliness analysis, melted bead and so on. According to the specific measured feature, the depth mode, resolution mode, and analysis mode of SEM should be firstly determined before use. Therefore, it is important to give user an easy operation mode to get deeper understanding on geometric features, thus offering a significantly enhanced user experience and higher measurement accuracy. Several common aspects of operated behavior should be tested that can cause them to yield larger measurement errors. In this paper, the experimental tests of full information acquisition of multi-scale pitches and step heights samples were respectively performed on a commercial SEM. The influence of the depth mode, resolution mode, and analysis mode of SEM were also discussed on edge features. Experimental results show that our works will be helpful of others who perform similar measurements.
The article studies the key technical parameters such as "horizontal position deviation", "distance-counting error", "velocity measurement error", and "time-counting error" of intelligent service terminal of cruising taxi, and determines the appropriate standards for the calibration of the parameters The novel calibration procedure presented in this article has been performed on several typical types of intelligent service terminals of cruising taxis widely used in China. The experimental and the uncertainty analysis results show that the calibration method presented in this article can be adopted for the periodic calibration of the intelligent service terminal of cruising taxi, in order to establish the metrological traceability system of the instrument.
In this paper, an automated edge detection model is developed for large irregular circular using a laser scanning approach. Some key influencing factors, just like surface quality, surface orientation and scan depth, have been respectively considered in this model. By consider of the limited of field of view and corresponding optical constraints, only a small part of key region is effectively captured by laser scanner at a specific posture. In term of specified view angles of laser scanner, the position of laser scanner approximate to the stand-off distance with respect to edge area can be determined and then high-quality point clouds of large irregular circular edge feature can be effectively obtained. Finally, a series of experiments are performed on workpieces with different large irregular circular features. The experimental result shows our method features high automation and high efficiency. Those results are most promising for on-machine applications in dimensional measurement of large-scale workpiece.
This article presents a novel automated measurement prototype for 3D geometry of mobile and large-scale conical workpiece, manipulated through two independent robot platforms that placed on its two sides with laser scanner and motorized linear stage. First, with point cloud that covers end point provided by laser scanner. Then, modeling and identification of end point of workpiece is established based on height variations in its nearest neighborhood with respect to virtual measurement datum plane, which is step-by-step derivatively generated according to initial datum point in an online virtual inspection environment. Next, the current geometry-relations between neighboring end points can be subsequently used to guide the laser scanner for high precision sampling surface area incorporating an automatic simple module. Moreover, both orientation and position geometrical relationships of the corresponding features on the fitting circles are analyzed too. Details preliminary experimental tests were performed to verify the measuring accuracy of this method.
Nowadays, 3D geometric dimensional measurements of step height are performed on many types of samples using different instruments, such as AFM, optical microscopy, et.al. For step height measurements generally, the traceability of the z-axis is very importance. In this paper, displacement metrology in the vertical direction or z-axis is first determined, thus having a known and specific relationship between the physical edge on the sample and the location of the detected edge in the image. By consider of the location of the step, a step height is calculated by requirement of fitting to upper and lower surfaces. An algorithm is introduced to fit the upper and lower terraces. Then, we locate the edge and determine the step height by the data extrapolation of those fits. In order to reduce the uncertainty budget for step height measurements, 50nm, 100nm, 200nm, 500nm and 1000nm step height are respectively tested, and dominant sources are also discussed.
Laser interference system has been extensively applied in high-precision geometric metrology benefit from the advantages of high accuracy, high resolution and stability in linear displacement measurement. In this paper, we present a novel and compact mechanical structure to realize the conversion between angular and linear displacement, so that the slight angular displacement can be enlarged and obtained by using the characteristics of high-precision linear displacement measurement of laser interference system. A series of experiments are carried out on this device, the conversion ratio of angular and linear displacement we achieved is 5.76 arcsec/ μm, which is determined by the transmission ratio of the worm gear pair and the pitch of the ball screw. By comparing the measured angular values with 23 reference values distributed on the whole circumference, the maximum original error of angular displacement measurement in this system without correction or compensation is ± 25 arcsec and the resolution is 0.6 arcsec.
A CMM with multiple probing systems have the power to deliver tremendous benefits to most notably manufacturing, and have the advantage of high automation, high integration and high precision. According to the ISO standard 10360-9, multiple probing system location error should be identify and calibrated before use. In this paper, a location error self-calibration model was established based on a composite artifact. The location error of individual probing system can be respectively determined reference to the position of the probe configuration. An error separation procedure was introduced to correct this location error. A series of representative experiments were performed on a commercial combined probing system produced by our partner. The experimental results show that multiple probing systems location error was effectively reduced from 4.5μm to2.8μm. Also, this calibration evaluation is very apparently practical outside a laboratory due to its simple, portable, low-cost, and rational procedure.
The characteristics of turbidity in the watershed of Chongqing City’s water supply system in interconnected reservoir basins between JiaLingJiang River and Chang Jiang River are investigated and analyzed by dynamic light scattering method (DLS). Three months of continuous turbidity measurements in seven sampling sites along the JiaLingJiang River were respectively performed from March to May in 2018. The experiment results demonstrated that the particles with highly similar light-scattering features are the main contribution to turbidity in the JiaLingJiang River. The analysis of turbidity time series showed that the particle populations from water sources impacts in downstream waters and the influence of urban wastewater pollution and wet weather pollutant was not obvious in those months. On the other hand, the relative errors of turbidity measurement results were always less than 3% with national turbidity standard.
This study proposes an experimental method for the performance evaluation of a commercial combined probing system equipped with a contacting probe, an imaging probe, and a line laser scanner developed by our cooperation. According to its application purpose, this method first obtains the circular characteristics of our novel designed 3D artefact composed of 2D rings, cone and cylinders. It is suitable to measure the touch probe, imaging probe as well as optical sensor. Next, detailed measuring procedures were defined for this artifact, in order to achieve comparable results and make the measurements feasible for the different sensors involved. A series of representative experiments were carried out on a commercial combined probing system produced by our partner. The experimental results show that multiple probing system form error and location error were less than 4.0μm, and multiple probing system size error was less than 2.0μm in three different registration positions. System combination errors were less than its maximum permissible errors (MPEs). On the other hand, its root mean errors (RMSE) were less than 0.5μm. Therefore, we can conclude that the designed artifact is suitable to be used to assess the performance of CMMs with multiple probing systems. These conclusions are helpful for further use of this combined probing system and can be utilized to optimize those combined parameters further.
A CMM with multiple probing systems have the power to deliver tremendous benefits to most notably manufacturing, and have the advantage of high automation, high integration and high precision. These probing system combinations must be tested to check their compliance with the specifications and to trace back the measurement results. In this paper, we present a novel multi-ring artifact and appropriate test procedures for probing system combinations similar to the well-known test procedures described in the ISO standard 10360-9. The characteristic of multi-rings artifact is keeping topology geometric relationships among 2D rings. Then, a series of representative experiments were carried out on a commercial combined probing system equipped with an imaging probe and a line laser scanner, and results have proved such multi-ring artifact as a fast way for performance test.
This article presents a novel multi-layer artifact for systematic error correction of a gap measuring system, consisting a 3D laser scanner and motorized linear stages. This artifact representation of five-layers gap shape with continuous free-form surface was designed, which include diverse form dimensions. Then, in order to improve the measurement accuracy of the range dimension of the gaps, a one-step calibration procedure based on an experimental process has been developed. The influence of the three parameters on width error, depth error and flush error, defining the relative position and the orientation between the scanner and the range gaps, is respectively considered. The results obtained in accuracy and repeatability tests performed on this multi-layer artifact primitives attest to the viability of this correction method for gap measuring system.
In industrial manufacturing processes, the dimensional inspection of the gaps on the free-form shape parts is critical and challenging, and is directly associated with subsequent assembly and terminal product quality. In this paper, a fast measuring method for automated gap inspection based on laser scanning technologies is presented. The proposed measuring method consists of three steps: firstly, the relative position is determined according to the geometric feature of measuring gap, which considers constraints existing in a laser scanning operation. Secondly, in order to acquire a complete gap profile, a fast and effective scanning path is designed. Finally, the range dimension of the gaps on the free-form shape parts including width, depth and flush, correspondingly, is described in a virtual environment. In the future, an appliance machine based on the proposed method will be developed for the on-line dimensional inspection of gaps on the automobile or aerospace production line.
Non-contact measurement techniques using 3D laser scanning have the power to deliver tremendous benefits to most notably manufacturing, and have the advantage of high speed and high detail output. However, procedures for evaluation and verification of non-contact laser line scanner have not been well-established because of many influencing factors like scan depth, incident angle, probe head orientation and surface properties. A truncated pyramid artifact representation of five- planar with different included angles was designed and used to straightforwardly identify the influence of in-plane and out-of-plane angle, as well as scan depth on dimensional measurement accuracy of the laser scanner. Then, a series of easy, fast and representative experiments, based on this simple artifact, were performed on a commercial laser line scanner, and found that the output of this scanner can be improved for metrology applications after calibration.
Non-contact measurement techniques using laser scanning have the power to deliver tremendous benefits to most notably manufacturing, and have the advantage of high speed and high detail output. However, a major obstacle to their widespread adoption in more complex on-line producing environments is their geometric constraints and low accuracy compared to the contact-based counterparts. The work presented in this paper introduces a performance evaluation test of laser line scanning for in-process inspection of 3D geometries. Some straightforward test methods that use a designed artifact are proposed. First, one work aims to experimentally investigate the location accuracy of knee point or corner point of edge features using a commercial laser stripe scanner, which is common in mechanical parts. Another work experimentally investigates the formation of outliers that may be usually promoted by reflective surfaces around surrounding area of corner point, and these outliers are characterized with large measurement errors, which significantly deteriorate the quality of the scanned point cloud data. Scanning path planning and outlier filter design are respectively discussed.
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