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Lianshan Wang
at Institute of Materials Research and Engineering
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Publications (1)
Proceedings Article | 15 February 2008 Paper
Nanopatterning and selective area epitaxy of GaN on Si substrate
L. Wang, S. Chua, S. Tripathy, K. Zang, B. Wang, J. Teng
Proceedings Volume 6894, 68940A (2008) https://doi.org/10.1117/12.762149
KEYWORDS: Gallium nitride, Silicon, Epitaxy, Nanostructures, Silicon carbide, Metalorganic chemical vapor deposition, Silica, Scanning electron microscopy, Raman spectroscopy, Dielectrics
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