Dr. Ling Feng Chen Profile

Dr. Ling Feng Chen

at Beijing Institute of Technology

SPIE Involvement:

Author

Publications (12)

Proceedings Article | 12 January 2018 Paper

Three-dimensional displacement measurement of image point by point-diffraction interferometry

Xiao He, Lingfeng Chen, Xiaojie Meng, Lei Yu

Proceedings Volume 10621, 1062106 (2018) https://doi.org/10.1117/12.2292028

KEYWORDS: Interferometry, Wavefronts, 3D metrology, Refractive index, Optical testing

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Proceedings Article | 8 October 2015 Paper

Laser differential reflection-confocal lens thickness measurement

Nan Zhou, Yun Wang, Weiqian Zhao, Lirong Qiu, Lingfeng Chen

Proceedings Volume 9677, 96771I (2015) https://doi.org/10.1117/12.2199689

KEYWORDS: Optical testing, Reflectors, Error analysis, Confocal microscopy, Distance measurement, Sensors, Precision measurement, Interferometers, Refractive index, Beam splitters

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SPIE Journal Paper | 1 May 2010 Open Access

Flat surface measurements on fiber point diffraction interferometer

Ling Feng Chen, Yaqing Ren, Jie Li

OE, Vol. 49, Issue 05, 050503, (May 2010) https://doi.org/10.1117/12.10.1117/1.3432575

KEYWORDS: Mirrors, Wavefronts, Diffraction, Spherical lenses, Optical testing, Point diffraction interferometers, Beam splitters, Interferometers, Relays, Precision measurement

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Proceedings Article | 3 February 2009 Paper

The simulation analysis of the scatterfield microscopy for the critical dimensions measurement

Lingfeng Chen, Dingguo Sha

Proceedings Volume 7160, 71602G (2009) https://doi.org/10.1117/12.806997

KEYWORDS: Polarization, Scatterometry, Reflectivity, Diffraction, Microscopy, Diffraction gratings, Silicon, Microscopes, Scatter measurement, Critical dimension metrology

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Proceedings Article | 12 March 2008 Paper

Fiber point diffraction interferometer in measurement of spherical lens

Shuo Wu, Tao geng Zhou, Jia ming Lin, Lin feng Chen, Liang Nie, Ding guo Sha

Proceedings Volume 6624, 662415 (2008) https://doi.org/10.1117/12.791112

KEYWORDS: Spherical lenses, Wavefronts, Mirrors, Point diffraction interferometers, Diffraction, Interferometers, Photovoltaics, Fiber lasers, Gemini Planet Imager, Single mode fibers

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Proceedings Article | 3 March 2008 Paper

Analysis for MRTD and DMRTD based on contrast simulation

Lingfeng Chen, Xusheng Zhang, Taogeng Zhou, Jiaming Lin

Proceedings Volume 6621, 66211M (2008) https://doi.org/10.1117/12.790859

KEYWORDS: Minimum resolvable temperature difference, Optical simulations, Sensors, Spatial frequencies, Numerical simulations, Staring arrays, Thermography, Infrared radiation, Target detection, Phase shift keying

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Proceedings Article | 28 November 2007 Paper

Key techniques in an absolute measurement method of spherical lens

Shuo Wu, Tao geng Zhou, Ding guo Sha, Jia ming Lin, Lin feng Chen

Proceedings Volume 6834, 683435 (2007) https://doi.org/10.1117/12.757044

KEYWORDS: Wavefronts, Spherical lenses, Mirrors, Phase shifting, Zernike polynomials, Interferometers, Photovoltaics, Gemini Planet Imager, Semiconductor lasers, Optical testing

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Proceedings Article | 28 November 2007 Paper

Evaluation of the sphericity measurement uncertainty for the fiber point diffraction interferometer

Lingfeng Chen, Dingguo Sha

Proceedings Volume 6834, 68342N (2007) https://doi.org/10.1117/12.756190

KEYWORDS: Wavefronts, Spherical lenses, Mirrors, Point diffraction interferometers, Ferroelectric materials, Phase shifting, Diffraction, Phase shifts, Interferometers, Beam splitters

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Proceedings Article | 27 November 2007 Paper

Wavefront fitting and evaluation of fiber point diffraction interferometer

Shuo Wu, Ding guo Sha, Jia ming Lin, Tao geng Zhou, Ling feng Chen, Liang Nie

Proceedings Volume 6723, 67230P (2007) https://doi.org/10.1117/12.782970

KEYWORDS: Wavefronts, Zernike polynomials, Spherical lenses, Mirrors, Point diffraction interferometers, Interferometers, Phase shifting, Metals, Optical testing, Numerical simulations

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Proceedings Article | 29 January 2007 Paper

The comparison of two kinds of fiber phase shifting point-diffraction interferometer

Lingfeng Chen, Liang Nie, Taogeng Zhou, Dingguo Sha

Proceedings Volume 6279, 627974 (2007) https://doi.org/10.1117/12.725886

KEYWORDS: Wavefronts, Spherical lenses, Interferometers, Mirrors, Phase shifting, Optical testing, Beam splitters, Phase shifts, Point diffraction interferometers, Optical fibers

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Proceedings Article | 6 November 2006 Paper

Research on the fiber point-diffraction interferometer for spherical figure measurement

Lingfeng Chen, Liang Nie, Taogeng Zhou, Dingguo Sha

Proceedings Volume 6357, 63574J (2006) https://doi.org/10.1117/12.717373

KEYWORDS: Spherical lenses, Wavefronts, Interferometers, Mirrors, Laser sources, YAG lasers, Error analysis, Optical testing, Diffraction, Beam splitters

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Proceedings Article | 2 September 2003 Paper

Research of measurement assurance program (MAP) for laser interferometer

Yue Feng, Lingfeng Chen, JianRong Ren, Dingguo Sha

Proceedings Volume 5253, (2003) https://doi.org/10.1117/12.521700

KEYWORDS: Interferometers, Process control, Standards development, Data processing, Laser applications, Statistical analysis, Statistical modeling, Optical spheres, Time metrology, Laser development

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Showing 5 of 12 publications

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