Ms. Ling Zhang Profile

Ling Zhang

at Ansys

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Publications (3)

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Proceedings Article | 17 June 2024 Presentation + Paper

Optical system design considering drift and jitter vibration impacts on performances

Hui Chen, Julia Zhang, Mojtaba Falahati, Christophe Weisse

Proceedings Volume 13019, 130191M (2024) https://doi.org/10.1117/12.3022734

KEYWORDS: Vibration, Modulation transfer functions, Finite element methods, Optical design, Beam jitter

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Optical systems used in aerospace applications are often subject to random vibrations. These random motions cause optical elements to shift position, leading to image registration errors, and lower image resolution. Quantifying the impact of these vibrations is key to validating the design, and time is a new factor to consider. The sensor integration time draws a line between slow (drift) and fast (jitter) pointing errors. Distinct methods are introduced to assess the impact of drift and jitter. Besides, if traditional tolerancing tools can be used to model independent elements displacements, this approach is not applicable in the context of vibration analysis. First, the interdependency of each displacement is missed. Then, neither the actual surface deformations due to mechanical stress, nor the potential heating are considered. To successfully solve all these challenges, we propose a new Multiphysics drift and jitter analysis workflow to assess the performance impacts in optical systems using finite elements analysis (FEA) results, from tools like Ansys Mechanical. The behavior of the whole opto-mechanical assembly can then be considered, and the resulting effects of vibration imported back into Ansys Zemax OpticStudio using the STAR tools. Both structural data (surface deformations, rigid body motions) and thermal data (temperature gradient, automatically converted into a gradient index) are used to update the nominal design and compute the impact on the optical performance metrics. New tools have been developed to easily consider series of these datasets, to fully understand vibration impacts and their time dependence. The new insights gained from this new workflow will help taking enlightened decisions for the optical system design as well as its packaging to achieve better performances on system level, in challenging conditions.

Proceedings Article | 12 March 2024 Poster + Paper

Optical system structural and thermal jitter analysis using Ansys Zemax OpticStudio

Hui Chen, Julia Zhang, Mojtaba Falahati, Christophe Weisse

Proceedings Volume 12877, 128771X (2024) https://doi.org/10.1117/12.3003303

KEYWORDS: Vibration, Point spread functions, Modulation transfer functions, Zemax, Ray tracing, Imaging systems, Thermal effects

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Optical systems used in aerospace applications are often subject to random vibrations excited by internal and external forces; these range from engine vibrations in airborne systems to gravity and wind forces for ground-based systems. These random motions cause optical elements to shift position, thereby impacting their imaging performance and leading to lower image resolution or image registration errors. Vibration jitter analysis is a method by which such performance degradation can be quantified, and it guides the opto-mechanical design of the system. However, such jitter analysis can be very challenging, as it often incorporates data exchange among several commercial software packages or in-house codes. In this paper we proposed a multiphysics jitter analysis workflow to analyze jitter induced performance impact in optical system using the Ansys Zemax OpticStudio STAR Module and Ansys Mechanical. Ansys mechanical performs finite element analysis of the optical system under field condition. The structural and thermal information is then passed back to Zemax OpticStudio STAR module to analysis the optical performance degradation. Two main jitter impacts are considered: the slow jitter effects due to temperature gradients and the fast jitter effects due to random vibration. The insight gained from this analysis will help guide optical system packaging design to achieve better performance on the system level.

Proceedings Article | 10 August 2023 Poster + Paper

Microscopic to macroscopic modelling of optical defect inspection system

Yi-Hao Chen, Ling Zhang, Han-Hsiang Cheng, Federico Doque Gomez, Sandra Gely

Proceedings Volume 12619, 126190T (2023) https://doi.org/10.1117/12.2673076

KEYWORDS: Wafer-level optics, Semiconducting wafers, Zemax, Inspection, Finite-difference time-domain method, Defect inspection, Near field optics, Modeling, Tunable filters, Optical inspection

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Optical inspection systems allow faster detection of defects on semiconductor wafers than scanning electron microscopy (SEM) inspection systems. However, optical detection becomes more challenging as the structure feature size shrinks below the optical diffraction limit with the advancement of technology nodes in semiconductor manufacturing. To overcome this challenge and achieve optimal performance, the optical system must be tailored to the specific characteristics of the wafer sample which requires knowledge of the underlying microscopic and macroscopic optical phenomena. In this work, we proposed a multiphysics simulation workflow to model the microscopic light interaction with the wafer sample using Ansys Lumerical FDTD and the macroscopic optics of the inspection system using Ansys Zemax OpticStudio. The optimum optical system design with maximum defect signal strength could be achieved through defect image analysis. Together, FDTD and OpticStudio facilitate the design of complex optical inspection systems and reduce the cycle time for creating inspection recipes in the development of advanced technology nodes in semiconductor manufacturing.

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