Micro-optical element has the advantages of miniaturization and integration, has developed rapidly. Many kinds of micro-optical elements have been proposed, designed and fabricated, due to their unique optical properties, showing great application prospects. The Fresnel zone plate (FZP), a kind of diffractive optical elements, which were convenient for design, process, and has the advantages of thin, lightweight, have been attained a lot of researches. Femtosecond laser processing has the ability of flexibility and accuracy, combined with High precision platform with three-axis, which can be used for fabricate FZP array rapidly. In this letter, a novel FZP array with the same focal length on the surface of the fused quartz fabricated with femtosecond laser direct writing by precise control and optimization of femtosecond processing parameters. As formed FZP array exhibited unique optical performance of imaging, which have important applications in the fields of the integrated optical imaging system.
Micro/nanostructure with a subwavelength period can be induced on the material surface by femtosecond laser, named as Laser Induced Periodic Surface Structure (LIPSS). The uniform LIPSS structure act as a grating that diffracts light, which can display vivid structural colors when illuminating the surface with white light. Structural color with periodic LIPSS structure has strong angle dependence, depends on the direction of the LIPSS structure, which provided us with a new method to realize multi-direction micro/nanostructure processing. By changing the femtosecond laser polarization, we can get the periodic micro/nanostructures in different directions. The polarization controllable femtosecond fabrication can be used for multi-pattern fabrication. The structural color with polarization sensitivity, different patterns could be observed in different directions. Moreover, different from other coloration methods, structural color has inherent stability, which have potential application in the fields of anti-counterfeiting, information storage and dynamic display. In this letter, we introduce a half wave plate to adjust the polarization state of the laser, and realize femtosecond laser variable polarization processing multi-pattern on a stainless steel foil.
Fused quartz has been broadly used as a base material for micro-optical components and microfluidic chips due to its high optical transmittance, high hardness and high chemical stability. These characteristics make fused quartz difficult to machine using conventional mechanical or chemical processing technology. When cutting, drilling or surface microstructure machining, it is easy to produce cracks and fractures, which will reduce the machining quality. Femtosecond laser can achieve high-precision, high-quality, and non-contact processing due to its ultra-short pulse width and ultra-high peak power, which giving it unique advantages in the field of micromachining. This paper proposes a method for precision machining of fused silica by femtosecond laser with a center wavelength of 515 nm, the relationship between the depth and the roughness of the micromachining and the processing parameters had been studied. Common micro-optical elements (dammann grating) with high surface quality could be fabricated on the fused quartz surface by the proper processing parameter, which showed a good performance of beam splitting.
Sapphire is widely used in industry, national defense, aerospace, space technology and other fields due to its excellent physical and chemical properties such as ultra-high hardness, good thermal and chemical stability, high transmittance and so on. Because of the brittleness of sapphire, edge collapse and fragmentation are occurring easily during the process of traditional mechanical machining. Therefore, development of a rapid and high-quality processing method has great significance. Compared with continuous / long pulse laser processing, femtosecond laser processing with ultra-short duration and extremely high peak power has the advantages of small thermal effect, high processing accuracy, real three-dimensional and wide material adaptability. In this paper, a method of machining sapphire with a center wavelength of 515 nm femtosecond laser and scanning galvanometer is proposed. The effects of laser power, processing speed and scanning pitch on the machining depth and surface roughness are studied. A 3D structure is fabricated by combining a scanning galvanometer and the XYZ platform with high speed. Finally, two types of arrays of 3D structure have been fabricated on sapphire, which has high machined surface quality.
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