Mr. Lutz Ehrig Profile

Lutz Ehrig

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Publications (1)

Proceedings Article | 28 February 2020 Paper

Minimization of nonlinearities in nano electrostatic drive actuators using validated coupled-field simulation

Anton Melnikov, Hermann A. G. Schenk, Franziska Wall, Barbara Spitz, Lutz Ehrig, Sergiu Langa, Michael Stolz, Bert Kaiser, Holger Conrad, Harald Schenk

Proceedings Volume 11293, 112930D (2020) https://doi.org/10.1117/12.2551271

KEYWORDS: Actuators, Finite element methods, Silicon, Microelectromechanical systems, Solids, Capacitors, Differential equations, Complex systems, Acoustics

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