In order to observe the morphology of nanostructures at the submicroscale, we use a confocal laser scanning (CLS) microscope built in our laboratory. The theoretical resolution of the hand-made CLS microscope is 150 nm and the performance of the microscope is evaluated by observing a USAF target. Vanadium pentoxide nanorods grown by electron beam irradiation and thermal oxidation methods are used as nanostructures and the morphologies of the nanorods observed by confocal laser scanning microscopy (CLSM) are compared with those obtained by scanning electron microscopy. The magnification and resolution of the CLSM were estimated to be approximately 1500 and 800 nm, respectively. From the results, we confirm that the CLSM can be used to measure nanostructures at the sub-micro-scale without a preconditioning process.
In order to confirm an applying capability of the CLSM, the V2O5 nanorods grown by the electron beam irradiation and
the thermal oxidation methods were used as nanostructures, and the CLSM was composed in our laboratory. The
theoretical resolution of the hand-made CLSM was found to be a 150 nm and evaluated by observing image of an USAF
target.The morphologies of the grown V2O5 nanorods grown were observed by the CLSM, and the morphologies were
compared with those obtained by the SEM. From the comparison with the result by the SEM, the magnification and the
resolution of the CLSM were estimated to be approximately 2000 and 500 nm, respectively. On the basis of this result, it
was considered that the CLSM can be used to measure the morphology of the nanostructures with a submicro-scale.
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