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Marco Preuß
at Westsächsische Hochschule Zwickau
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Publications (2)
Proceedings Article | 7 March 2019 Paper
Thin-film characterization with a dual-channel dispersion-encoded imaging low-coherence interferometry approach
Ch. Taudt, M. Preuß, B. Nelsen, T. Baselt, E. Koch, P. Hartmann
Proceedings Volume 10925, 109250L (2019) https://doi.org/10.1117/12.2509676
KEYWORDS: Thin films, Interferometry, Spectroscopy, Reflection, Interferometers, Beam splitters, Signal detection, Interfaces, Refractive index, Data modeling
Proceedings Article | 24 May 2018 Paper
Dispersion-controlled low-coherent interferometry for thin-film characterization
M. Preuß, Ch. Taudt, B. Nelsen, P. Hartmann
Proceedings Volume 10678, 106780R (2018) https://doi.org/10.1117/12.2307166
KEYWORDS: Thin films, Interferometry, Interferometers, Spectroscopy, Data analysis, Light sources, Algorithm development, Reflectometry, Ellipsometry, Signal detection
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