Dr. Mark Schürmann Profile

Dr. Mark Schürmann

at Fraunhofer-IOF

SPIE Involvement:

Author

Publications (15)

Proceedings Article | 12 July 2019 Open Access

Protected silver coatings for reflectors

Stefan Schwinde, Mark Schürmann, Ralph Schlegel, Jan Kinast, Reinhold Dorn, Jean Louis Lizon, Sebastien Tordo, Norbert Kaiser

Proceedings Volume 11180, 111804M (2019) https://doi.org/10.1117/12.2536085

KEYWORDS: Silicon, Aluminum, Reflectors, Sputter deposition, Silver, Argon, Resistance, Reflectivity, Oxygen, Infrared spectroscopy

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Proceedings Article | 5 June 2018 Paper

Optical characterisation of silver mirrors protected with transparent overcoats

A. Sytchkova, S. Schwinde, M. L. Protopapa, M. Palmisano, A. Piegari, M. Schürmann, N. Kaiser

Proceedings Volume 10691, 106910N (2018) https://doi.org/10.1117/12.2312077

KEYWORDS: Silver, Mirrors, Optical coatings, Dielectrics, Data modeling, Oxides, Refractive index, Sputter deposition

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Proceedings Article | 5 June 2018 Paper

Si/SiO2-based filter coatings for astronomical applications in the IR spectral range

R. Schlegel, D. Gäbler, M. Schürmann, R. Follert, U. Seemann, E. Oliva, S. Schwinde

Proceedings Volume 10691, 106911E (2018) https://doi.org/10.1117/12.2311310

KEYWORDS: Refractive index, Optical coatings, Silicon, Germanium, Optical filters, Annealing, Sputter deposition

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Proceedings Article | 17 November 2017 Open Access

High-reflective coatings for ground and space based applications

M. Schürmann, S. Schwinde, P. Jobst, O. Stenzel, S. Wilbrandt, A. Szeghalmi, A. Bingel, P. Munzert, N. Kaiser

Proceedings Volume 10563, 105630M (2017) https://doi.org/10.1117/12.2304172

KEYWORDS: Silver, Optical coatings, Reflectivity, Aluminum, Atomic layer deposition, Particles, Contamination, Mirrors, Multilayers, Humidity

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Proceedings Article | 22 July 2016 Paper

Manufacturing and coating of optical components for the EnMAP hyperspectral imager

M. Schürmann, D. Gäbler, R. Schlegel, S. Schwinde, T. Peschel, C. Damm, R. Jende, J. Kinast, S. Müller, M. Beier, S. Risse, B. Sang, M. Glier, H. Bittner, M. Erhard

Proceedings Volume 9912, 991230 (2016) https://doi.org/10.1117/12.2232914

KEYWORDS: Mirrors, Coating, Prisms, Imaging systems, Antireflective coatings, Spectrometers, Surface finishing, Telescopes, Silver, Short wave infrared radiation

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Proceedings Article | 23 September 2015 Paper

Protected and enhanced silver for mirrors: damage mechanisms and how to prevent them

S. Schwinde, M. Schürmann, Norbert Kaiser, Andreas Tünnermann

Proceedings Volume 9627, 96271R (2015) https://doi.org/10.1117/12.2191216

KEYWORDS: Silver, Reflectivity, Corrosion, Particles, Mirrors, Metals, Refractive index, Aluminum, Sensors, Gold

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Proceedings Article | 12 March 2015 Paper

Metal mirrors with metal-dielectric HR-coating for ultrashort laser pulses applied in scanner applications

M. Schürmann, S. Risse, H. Kämmer, C. Franke, R. Schlegel, S. Müller, C. Damm, R. Steinkopf, F. Dreisow, S. Nolte, R. Eberhardt, N. Kaiser

Proceedings Volume 9351, 93510S (2015) https://doi.org/10.1117/12.2079487

KEYWORDS: Mirrors, Coating, Metals, Reflectivity, Polishing, Dielectrics, Surface finishing, Laser damage threshold, Picosecond phenomena, Diamond turning

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Proceedings Article | 13 September 2012 Paper

Reflectivity, polarization properties, and durability of metallic mirror coatings for the European Solar Telescope

A. Feller, N. Krishnappa, O. Pleier, J. Hirzberger, P. J. Jobst, M. Schürmann

Proceedings Volume 8450, 84503U (2012) https://doi.org/10.1117/12.927080

KEYWORDS: Silver, Reflectivity, Mirrors, Aluminum, Dielectric polarization, Optical coatings, Gemini Observatory, Polarization, Solar telescopes, Telescopes

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Proceedings Article | 13 September 2012 Paper

Optical reflector coatings for astronomical applications from EUV to IR

Mark Schürmann, Paul Johannes Jobst, Sergiy Yulin, Torsten Feigl, Hanno Heiße, Steffen Wilbrandt, Olaf Stenzel, Andreas Gebhardt, Stefan Risse, Norbert Kaiser

Proceedings Volume 8450, 84502K (2012) https://doi.org/10.1117/12.925425

KEYWORDS: Optical coatings, Reflectivity, Silver, Mirrors, Metals, Polishing, Optics manufacturing, Reflectors, Astronomy, Amorphous silicon

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Proceedings Article | 4 October 2011 Paper

Optical and mechanical properties of oxide UV coatings, prepared by PVD techniques

Olaf Stenzel, Mark Schürmann, Steffen Wilbrandt, Norbert Kaiser, Andreas Tünnermann, Mathias Mende, Henrik Ehlers, Detlev Ristau, Stefan Bruns, Michael Vergöhl, Werner Riggers, Martin Bischoff, Mario Held

Proceedings Volume 8168, 81681W (2011) https://doi.org/10.1117/12.896775

KEYWORDS: Coating, Ultraviolet radiation, Oxides, Refractive index, Silicon, Thin films, Glasses, Temperature metrology, Silica, Semiconducting wafers

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Proceedings Article | 19 May 2011 Paper

Study on the lifetime of Mo/Si multilayer optics with pulsed EUV-source at the ETS

Mark Schürmann, Sergiy Yulin, Viatcheslav Nesterenko, Torsten Feigl, Norbert Kaiser, Boris Tkachenko, Max Schürmann

Proceedings Volume 8077, 80770X (2011) https://doi.org/10.1117/12.891803

KEYWORDS: Extreme ultraviolet lithography, Carbon, Extreme ultraviolet, Contamination, Reflectivity, Mirrors, EUV optics, Gases, Synchrotron radiation, Wafer-level optics

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Proceedings Article | 26 March 2011 Paper

Optics contamination studies in support of high-throughput EUV lithography tools

S. Hill, N. Faradzhev, L. Richter, S. Grantham, C. Tarrio, T. Lucatorto, S. Yulin, M. Schürmann, V. Nesterenko, T. Feigl

Proceedings Volume 7969, 79690M (2011) https://doi.org/10.1117/12.879852

KEYWORDS: Contamination, Extreme ultraviolet lithography, Extreme ultraviolet, EUV optics, Carbon, Molecules, Synchrotrons, Mirrors, Ruthenium, Spectroscopic ellipsometry

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Proceedings Article | 23 March 2010 Paper

Multi-technique study of carbon contamination and cleaning of Mo/Si mirrors exposed to pulsed EUV radiation

Mark Schürmann, Sergiy Yulin, Viatcheslav Nesterenko, Torsten Feigl, Norbert Kaiser, Boris Tkachenko, Max Schürmann

Proceedings Volume 7636, 76361P (2010) https://doi.org/10.1117/12.848197

KEYWORDS: Carbon, Extreme ultraviolet lithography, Contamination, Reflectivity, Extreme ultraviolet, Mirrors, Silicon, Bioalcohols, X-rays, Oxidation

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Proceedings Article | 25 September 2008 Paper

Metal layer beamsplitters with one dielectric achromatisation layer

M. Schürmann, W. Stöckl, N. Kaiser

Proceedings Volume 7101, 71011J (2008) https://doi.org/10.1117/12.797295

KEYWORDS: Beam splitters, Dielectrics, Coating, Metals, Absorption, Reflection, Reflectivity, Silver, Aluminum, Refractive index

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Proceedings Article | 3 September 2008 Paper

Enhanced reflectivity and stability of high-temperature LPP collector mirrors

Torsten Feigl, Sergiy Yulin, Marco Perske, Hagen Pauer, Mark Schürmann, Norbert Kaiser, Norbert Böwering, Oleg Khodykin, Igor Fomenkov, David Brandt

Proceedings Volume 7077, 70771W (2008) https://doi.org/10.1117/12.802322

KEYWORDS: Reflectivity, Mirrors, Coating, Extreme ultraviolet, Multilayers, Silicon, Molybdenum, Annealing, Interfaces, Plasma

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Showing 5 of 15 publications

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