Mr. Martin Glimtoft Profile

Martin Glimtoft

Lithography Specialist at Mycronic AB

SPIE Involvement:

Author

Publications (9)

Proceedings Article | 13 November 2024 Presentation

Meander writing, to further enhance maskshop productivity with the SLX laser mask writer

Robert Eklund, Mikael Wahlsten, Anders Svensson, Mats Rosling, Martin Glimtoft, Xueying Hai, Youngjin Park

Proceedings Volume 13216, 1321618 (2024) https://doi.org/10.1117/12.3034692

KEYWORDS: Semiconductor manufacturing, Semiconductor lasers, Manufacturing, Industry, Industrial applications, Design

Read Abstract +

Proceedings Article | 12 November 2024 Presentation + Paper

Evaluating high-throughput mask systems for mainstream technology applications

Martin Glimtoft, Robert Eklund, Mikael Wahlsten, Mats Rosling, Anders Svensson, Youngjin Park, Yukihiro Fujimura, Izumi Hotei, Mei Ebisawa, Yusuke Shoji, Shingo Yoshikawa

Proceedings Volume 13216, 132160L (2024) https://doi.org/10.1117/12.3034858

KEYWORDS: Photomasks, Deep ultraviolet, Printing, Design, Laser applications, Semiconductors, Industry, Semiconductor lasers, Semiconducting wafers, Scanning electron microscopy

Read Abstract +

Proceedings Article | 22 November 2023 Presentation

The SLX journey: designing a cost-efficient laser mask writer for today’s and tomorrow’s maskshop requirements

Robert Eklund, Mikael Wahlsten, Mats Rosling, Martin Glimtoft, Peter Henriksson, Anders Svensson, Fredric Ihren, Youngjin Park

Proceedings Volume PC12751, PC127510H (2023) https://doi.org/10.1117/12.2687582

KEYWORDS: Laser development, Sustainability, Semiconductors, Semiconductor manufacturing, Manufacturing, Laser marking, Carbon

Read Abstract +

Proceedings Article | 11 November 2022 Presentation

DUV mask writer addressable to 90nm nodes with a sustainability profile

Robert Eklund, Mikael Wahlsten, Mats Rosling, Martin Glimtoft, Gunnar Gustafsson, Ylva Mjöberg Wentzel, Anna-Karin Drake, Youngjin Park

Proceedings Volume PC12293, PC122930J (2022) https://doi.org/10.1117/12.2641791

KEYWORDS: Photomasks, Deep ultraviolet, Semiconductors, Manufacturing, Electronics, Climate change, Agriculture

Read Abstract +

Proceedings Article | 15 September 2022 Presentation

Laser mask writer addressable to 90nm nodes with sustainability considered

Martin Glimtoft

Proceedings Volume PC12325, PC123250L (2022) https://doi.org/10.1117/12.2656154

Read Abstract +

Proceedings Article | 12 October 2021 Presentation + Paper

A new generation cost-efficient laser mask writer, addressable up to the 90nm node

Robert Eklund, Mats Rosling, Mikael Wahlsten, Martin Glimtoft, Göran Hansson, Anders Svensson, Youngjin Park

Proceedings Volume 11855, 1185511 (2021) https://doi.org/10.1117/12.2600939

KEYWORDS: Photomasks, Semiconductors, Laser applications, Semiconductor lasers, Manufacturing, Laser sources, Diagnostics, Deep ultraviolet, Solid state lighting, Modulation

Read Abstract +

Proceedings Article | 12 May 2016 Paper

Stand-off detection of explosives and precursors using compressive sensing Raman spectroscopy

Mattias Svanqvist, Martin Glimtoft, Matilda Ågren, Markus Nordberg, Henric Östmark

Proceedings Volume 9824, 98240C (2016) https://doi.org/10.1117/12.2222991

KEYWORDS: Compressed sensing, Raman spectroscopy, Digital micromirror devices, Explosives, Imaging spectroscopy, Explosives detection, Particles, Sulfur, Hyperspectral imaging, Sensors

Read Abstract +

Proceedings Article | 3 May 2016 Paper

Digital micromirror devices in Raman trace detection of explosives

Martin Glimtoft, Mattias Svanqvist, Matilda Ågren, Markus Nordberg, Henric Östmark

Proceedings Volume 9823, 982312 (2016) https://doi.org/10.1117/12.2223753

KEYWORDS: Digital micromirror devices, Raman spectroscopy, Explosives, Explosives detection, Imaging spectroscopy, Compressed sensing, Sulfur, Particles, Luminescence, Image restoration

Read Abstract +

Proceedings Article | 29 May 2014 Paper

Towards eye-safe standoff Raman imaging systems

Martin Glimtoft, Petra Bååth, Heikki Saari, Jussi Mäkynen, Antti Näsilä, Henric Östmark

Proceedings Volume 9072, 907210 (2014) https://doi.org/10.1117/12.2049676

KEYWORDS: Raman spectroscopy, Mirrors, Imaging systems, Ultraviolet radiation, Eye, Signal detection, Explosives, Telescopes, Reflectivity, Particles

Read Abstract +

Showing 5 of 9 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years