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Dr. Martin Steglich
at Carl Zeiss Jena GmbH
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Author
Publications (4)
Proceedings Article | 28 August 2024 Poster
BrG studies at high-spectral resolution with GRAVITY+: the design of a new high-resolution Germanium grism
Proceedings Volume 13095, 130952F (2024) https://doi.org/10.1117/12.3020375
Proceedings Article | 12 July 2023 Open Access Paper
Enhanced resolution light scattering analyzer for curved gratings – ELSA/CG-S
Matthias Zilk, Tilman Glaser, Felix Koch, Martin Steglich, Thomas Wollweber, Dennis Lehr, Dana Tomuta, Mathijs Arts, Volker Kirschner
Proceedings Volume 12777, 1277717 (2023) https://doi.org/10.1117/12.2689273
KEYWORDS: Equipment, Diffraction gratings, Optical gratings, Cameras, Signal to noise ratio, Relays, Light sources and illumination, Diffraction, Astronomical imaging, Sensors
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Proceedings Article | 12 July 2023 Open Access Paper
Holographically patterned blazed gratings with low groove density
Matthias Burkhardt, Martin Steglich, Alexander Kalies, Michael Helgert, Dennis Lehr
Proceedings Volume 12777, 127772I (2023) https://doi.org/10.1117/12.2689990
KEYWORDS: Blazed gratings, Diffraction gratings, Holography, Optical gratings, Diffraction, Etching, Photoresist materials, Standing waves, Astronomical imaging, Photoresist developing
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Proceedings Article | 21 August 2020 Presentation + Paper
XUV gratings based on holography
Matthias Burkhardt, Martin Steglich, Michael Helgert, Dennis Lehr
Proceedings Volume 11491, 1149109 (2020) https://doi.org/10.1117/12.2568754
KEYWORDS: Holography, Diffraction gratings, Extreme ultraviolet, Manufacturing, Optical design, Etching, Polishing, Diffraction, Optics manufacturing
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