Mr. Masahiro Yamamoto Profile

Masahiro Yamamoto

at Tokyo Electron America Inc

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Publications (2)

Proceedings Article | 25 March 2008 Paper

Low-k n&k variation impact on CD accuracy of scatterometry

Yan Chen, Masahiro Yamamoto, Dmitriy Likhachev, Gang He, Akihiro Sonoda, Vi Vuong

Proceedings Volume 6922, 69223R (2008) https://doi.org/10.1117/12.773133

KEYWORDS: Scatterometry, Critical dimension metrology, Dielectrics, Semiconducting wafers, Refractive index, Optical properties, Scatter measurement, Data modeling, Semiconductor manufacturing, Process modeling

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Proceedings Article | 10 May 2005 Paper

Optical digital profilometry (ODP) feasibility studies for CD control in lithography applications

Masahiro Yamamoto, Shoichi Iwabuchi

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.599407

KEYWORDS: Critical dimension metrology, Semiconducting wafers, Scatterometry, Metrology, Lithography, Scanners, Lamps, Process control, Temperature metrology, Reliability

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